Shimadzu ICPE-9000, Инструкция по эксплуатации

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5 Configuration and Operating Principle of the ICPE-9000
5-20
5.15 RF Power Supply
The RF power supply includes the output unit, which is configured with transistors, the matching circuits
for the output unit and the RF coil, and control system for external control. This power supply is
designed specifically for use with plasma and improved for the use of digital control instead of analog
control.
Matching box
RF coil
Phase detector
RFG-CONT PCB
RF unit
Fig. 5-15 Names of RF Power Supply Parts
(1) RFG-CONT PCB
Controls each part of this power supply. It has the following three functions.
* Exchange of signals with the CPU
* Control of autotuning
* Safety checks
(2) RF Unit
Produces a maximum output of 1.6 kW at a frequency of 27.12 MHz.
(3) Phase Detector Unit
Detector for RF power.