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5 Configuration and Operating Principle of the ICPE-9000
5-3
5.3 External Connection of Power Supply, Argon Gas, and Coolant
The ICPE-9000 requires a single-phase, 200/220/230/240-V, 50/60-Hz, 30-A power supply, a ground,
argon gas, and coolant.
The coolant is used to cool the cooling jacket, the RF coil, and the CCD. The coolant for the cooling
jacket and the RF coil is provided from the same system. Either mains water or a cooling water
circulation system is used. The coolant for the CCD is provided separately from a cooling water
circulation system. (See item (12) under "3.1 Installation Environment".)
Argon gas is supplied to the plasma torch, the nebulizer, the cooling jacket (for purge gas), and the CCD
at independently adjusted flow rates.
Power cable
Ground cable
Argon gas
Coolant for RF coil
and cooling jacket
CCD coolant
LAN terminal
Fig. 5-3 External Connection of Power Supply, Argon Gas, and Coolant
Содержание ICPE-9000
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