SevenStar D07-7C / ZM, Инструкция по эксплуатации

Страница: 33 / 60

Page 1 of 27
Operating Manual
1. APPLICATION & FEATURES
Mass Flow Meter (MFM) accurately measures mass flow rates, Mass Flow Controller (MFC) accurately
measures and controls mass flow rates despites
gas volume fluctuated due to pressure or temperature changes.
Which is widely applied in the fields as: semiconductor and IC fabrication, special materials science, chemical
industry, petrolic industry, pharmaceutical industry, environmental protecting and vacuum system researching,
etc.. The typical applications include: microelectronic process equipment such as diffusion, oxidation, epitaxy,
CVD, plasma etching, sputtering, ion implantation; vacuum deposition equipment, optical fiber melting,
micro-reaction equipment, mixing & matching gas system, capillary flow control system, gas chromatograph and
other analytical instruments.
D07 series MFM & MFC bring the high accuracy, excellent repeatability, quick response, soft-start, better
reliability, wide variety ranges of operation pressure (good operation in high pressure and vacuum situations),
simple convenient operation, flexible installation, possible connecting with PC to carry out automatic control to
the users’ system. D07 series better is connected together with D08 series Readout Boxes, the cable connection is
showing as following (Figure 1):
Figure 1 MFC and Flow Readout Box