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7.
TROUBLESHOOTING
Table 3. Failure Handling
NO. FAILURE
CAUSE
TREATMENT
1
There is no gas flow
after turn on.
1.1 Gas flow is shutting off, no gas
inputting
Check the gas sourcing and make it
open
1.2 Valve
control switch is shutoff
Turn the switch to CONTROL or
PURGE
1.3 No setting signal
Check potentiometer or “In/Out” switch
setting position
1.4 Filter is blocked
* Change a new filter
1.5 Valve failure
Test or *clean valve
1.6 Circuit failure
*Repair the electric circuit
2
In case of turning on
but without gas flow,
the flow rate testing is
error.
2.1 Zero excursion
Adjust the zeroing potentiometer
2.2 Power supply failure
*Check input/output voltages(
±
15VDC, +5.00VDC)
2.3 Sensor failure
*Replace the new sensor
2.4 Amplifier or other circuits failure
*Replace amplifier or repair circuit
3
In case of valve
shutting off, there is
still heavy flow rate
passing.
3.1 Over- load pressure of input
outlet, the differential pressure between
inlet and outlet is beyond rating.
Reduce the inlet operating pressure to
decrease differential pressure.
3.2 Pollution of valve
*Clean valve and replace seal ring
3.3 Valve failure
*Re-adjust solenoid control valve
4
The flow rate display
could not reach to full
scale flow rate value.
4.1 Pressure is lower than the rating
Heighten the inlet pressure
4.2 Block of bypass
*Clean bypass
4.3 Setting voltage is less than5.00V *Check
the
setting
Voltage
4.4 Others trouble
*Repair circuit etc.
Содержание D07-7C / ZM
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Страница 3: ...1 26 1 D07 2 Mass Flow Meter MFM Mass Flow Controller MFC CVD D07 D07 D08 1...
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Страница 14: ...12 26 b 10 MFC MFM 15V D A A D 15V 10 5 5 11 15 10 A D D A 15V 15V PLC 15V 15V 15V 15V COM 0 5 00V 0 5V...
Страница 15: ...13 26 D08 6 D08 6 1 6 1 1 12 a 20 5 15 5 5 b 2 c 11 7C 7CM...
Страница 16: ...14 26 d e 12 6 1 2 MFC 6 1 3 1 9 6 1 4 1 10...
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Страница 19: ...17 26 7 7 N2 10 1 100 SCCM N2 MFC 86 SCCM 10 1 0 719 86 0 719 61 8 SCCM 10 2...
Страница 22: ...20 26 D07 7C007001LCCNUS D07 7C 007 001L CC N U S D07 7C MFC H2 1SLM Compression fitting 1 4 0 05 0 3 MPa 40...
Страница 23: ...21 26 8 3 1 1 1 1 2 1 3 1 4 1 5 1 6 2 2 1 2 2 15V 2 3 2 4 3 3 1 3 2 3 3 4 4 1 4 2 MFC 4 3 5 00V 4 4...
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Страница 30: ...D07 7C ZM Mass Flow Controller D07 7CM ZM Mass Flow Meter INSTRUCTION MANUAL Version Dec 2015...