SevenStar D07-7C / ZM Скачать руководство пользователя | Manualshive

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第

18

页

共

26

页

7.8 D07-7C

、

7CM

标准订单的填写格式

D07

-

[t] [g,g,g] [r,r,r,r] [f,f] [s] [m] [d]

[t]

–

型号

- [7C ]

质量流量控制器

- [7CM]

质量流量计

[g,g,g]

–

使用气体

依照标准

SEMI52-0302

例如

:

-[ 013 ] N

2

-[ 007 ] H

2

-[ 000 ]

混合气体详见

[d]

[r,r,r,r]

–

满量程流量

- [ 005C] 5SCCM
- [ 010C]    10SCCM
- [ 020C]    20SCCM
- [ 030C]    30SCCM
- [ 050C]    50SCCM
- [ 100C]    100SCCM
- [ 200C]    200SCCM
- [ 300C]    300SCCM
- [ 500C]    500SCCM
- [ 001L]    1SLM
- [ 002L]    2SLM
- [ 003L]    3SLM
- [ 005L]    5SLM
- [ 010L]    10SLM
- [ 000C]

特殊量程详见

[d]

«
...
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19
20
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Содержание D07-7C / ZM

Страница 1: ...D07 7C D07 7CM 2015 12...

Страница 2: ...5 7 1 15 5 7 7 2 15 5 1 7 7 3 16 5 2 8 7 4 16 5 3 9 7 5 16 5 4 11 7 6 16 5 5 12 7 7 17 6 13 7 8 D07 7C 7CM 18 6 1 13 8 21 6 1 1 13 9 23 6 1 2 14 9 1 23 6 1 3 14 9 2 23 6 1 4 14 9 3 23 6 1 5 15 10 24 6...

Страница 3: ...1 26 1 D07 2 Mass Flow Meter MFM Mass Flow Controller MFC CVD D07 D07 D08 1...

Страница 4: ...2 26 1...

Страница 5: ...00 SCCM 0 1 2 3 5 10 SLM 2 1 5 F S 3 1 F S 4 0 2 F S 5 10 sec 4 sec 6 0 1 0 5 MPa 7 3 MPa 8 5 45 9 0 V 5 00 V 100K 3mA 10 15 V 50 mA 15V 200 mA 11 4 12 1 1 kg N2 SCCM SLM 273 15K 0 101325 Pa 760mm Hg...

Страница 6: ...M D07 7CM 1 0 5 10 20 30 50 100 200 300 500 SCCM 0 1 2 3 5 10 SLM 2 1 5 F S 3 1 F S 4 0 2 F S 5 10 sec 6 0 01 MPa 7 3 MPa 8 5 45 9 0 V 5 00 V 100K 3mA 10 15 V 50 mA 15 V 50 mA 11 5 12 0 92 kg 1 2 7CM...

Страница 7: ...5 26 2 7C 7CM 7C 4 2 D08 3 3 D D D...

Страница 8: ...6 26 3 F S 5V 2 100 F S 0 1 F S 10V 5V I 15V 15V 0V 220V 100 0 0 5 00V set out COM 5 00V 0 5 00V 15V 15V 0...

Страница 9: ...7 26 0 5 V 5 5 1 7C 7CM 4 5 4 D07 7C MFC...

Страница 10: ...8 26 5 D07 7CM MFM 108mm 50mm 5 2 VCR 8 a Compression Fitting 3 mm b Compression Fitting 6 mm c Compression Fitting 8 mm d Compression Fitting 1 8 e Compression Fitting 1 4 f VCR 1 4 g 6 1 h 4 1 6...

Страница 11: ...9 26 6 6 1 25 5 3 8 9 15 1 7 7C D 1 2 3 4 5 6 7 10 11 12 13 14 15 9 8 0 5V 15V 15V 15V 15V 15V 15V 15V...

Страница 12: ...10 26 D07 7C D07 7A 7C D 7A 7C 7A 7A 7C 7CM 8 7CM 7C 15V 15V 8 7CM D 6 5 4 3 2 1 15 14 13 12 11 10 9 8 7 15V 15V 15V...

Страница 13: ...11 26 5 4 a 9 0V 5V 0 A D 5 00V MFC 3mA 0V 5 00V 3 3K 5 00V D A 100K 10 9 A D D A 15V 15V PLC...

Страница 14: ...12 26 b 10 MFC MFM 15V D A A D 15V 10 5 5 11 15 10 A D D A 15V 15V PLC 15V 15V 15V 15V COM 0 5 00V 0 5V...

Страница 15: ...13 26 D08 6 D08 6 1 6 1 1 12 a 20 5 15 5 5 b 2 c 11 7C 7CM...

Страница 16: ...14 26 d e 12 6 1 2 MFC 6 1 3 1 9 6 1 4 1 10...

Страница 17: ...15 26 6 1 5 3 9 15V 15V 6 1 6 6 2 6 2 1 15 6 2 2 5 5 6 2 3 6 2 4 7 7 1 7 2 00Cr17Ni14Mo2 316L 7C 7CM BCl3 BBr3 7C...

Страница 18: ...16 26 2 7 3 2 F S 2 7 4 7 5 7 6...

Страница 19: ...17 26 7 7 N2 10 1 100 SCCM N2 MFC 86 SCCM 10 1 0 719 86 0 719 61 8 SCCM 10 2...

Страница 20: ...r r f f s m d t 7C 7CM g g g SEMI52 0302 013 N2 007 H2 000 d r r r r 005C 5SCCM 010C 10SCCM 020C 20SCCM 030C 30SCCM 050C 50SCCM 100C 100SCCM 200C 200SCCM 300C 300SCCM 500C 500SCCM 001L 1SLM 002L 2SLM...

Страница 21: ...G Compression Fitting 6mm DD Compression Fitting 8mm BB Compression Fitting 1 8 CC Compression Fitting1 4 MM VCR 1 4 TT 4 1 RR 6 1 XX d s V N m H E U D d D07 7C 0 1 0 5 MPa 14 5 72 5 psid D07 7CM 0 01...

Страница 22: ...20 26 D07 7C007001LCCNUS D07 7C 007 001L CC N U S D07 7C MFC H2 1SLM Compression fitting 1 4 0 05 0 3 MPa 40...

Страница 23: ...21 26 8 3 1 1 1 1 2 1 3 1 4 1 5 1 6 2 2 1 2 2 15V 2 3 2 4 3 3 1 3 2 3 3 4 4 1 4 2 MFC 4 3 5 00V 4 4...

Страница 24: ...22 26 3 5 5 1 5 2 5 3 6 6 1 6 2 6 3 7 7 1 7 2 7 3 8 8 1 8 2 9 9 1 9 2 10 10 1...

Страница 25: ...23 26 9 9 1 9 1 1 MFC MFM 9 1 2 9 1 3 9 1 4 90 9 1 5 9 2 a MFC MFM 30 m b c d MFC 5mV e f MFC MFM 9 3 www mfcsevenstar com cn...

Страница 26: ...H4 038 0 3658 1 2510 0 598 C2H6 054 0 4241 1 3420 0 481 C3H4 068 0 3633 1 7870 0 421 C3H6 069 0 3659 1 8770 0 398 C3H8 089 0 3990 1 9670 0 348 C4H6 093 0 3515 2 4130 0 322 C4H8 104 0 3723 2 5030 0 294...

Страница 27: ...5005 0 7600 0 719 NO 016 0 2378 1 3390 0 976 NO2 026 0 1923 2 0520 0 741 N2O 027 0 2098 1 9640 0 709 O2 015 0 2196 1 4270 0 992 PCl3 193 0 1247 6 1270 0 358 PH3 031 0 2610 1 5170 0 691 PF5 143 0 1611...

Страница 28: ...2 n C C 0 3106 N Cp CP N N Ar He 1 01 CO N2 1 00 CO2 NO2 0 94 NH3 C4H8 0 88 N N1 1 T N2 2 T Nn n T 0 3106 N1 1 T N2 2 T Nn n T C 1Cp1 1 T 2Cp2 2 T nCpn n T 1 n T 1 n CP1 CPn N1 Nn 1 101325Pa 760 mm Hg...

Страница 29: ...1 741 3 100015 86 10 64362939 64362925 86 10 64362923 www mfcsevenstar cn E mail mfcsales sevenstar com cn 401 516 368 29 722 86 21 63532370 86 21 63533265 45 B712 518031 86 755 88290258 86 755 88294...

Страница 30: ...D07 7C ZM Mass Flow Controller D07 7CM ZM Mass Flow Meter INSTRUCTION MANUAL Version Dec 2015...

Страница 31: ...r manual introduces the important issues including the proper and safe use of the products And please notice the words and section with the symbol Not in accordance with the user manual for the use of...

Страница 32: ...lation Position 17 4 5 PC Connections 11 6 6 Operation Pressure Resistance 18 4 6 Zero Adjustment 12 6 7 Calibration and Conversion 18 5 OPERATION INSTRUCTIONS 14 6 8 D07 7C 7CM Ordering Code 19 5 1 M...

Страница 33: ...fusion oxidation epitaxy CVD plasma etching sputtering ion implantation vacuum deposition equipment optical fiber melting micro reaction equipment mixing matching gas system capillary flow control sys...

Страница 34: ...peration Temperature 5 45 9 Input Output Signal 0 V 5 00 V Input resistance value 100K output current 3mA 10 Valve N C Solenoid 11 Power Supply 15 V 50 mA 15V 200 mA 12 Dimension According to Figure 4...

Страница 35: ...F S 5 Response Time 10 sec 6 Differential pressure 0 01 MPa 7 Max pressure 3 MPa 8 Operation temperature 5 C 45 C 9 Setting output signal 0 V 5 00 V input resistance value 100K output current 3mA 10...

Страница 36: ...ing on the thin wall capillaries As the gas flows through the sensor tube gas molecules carry heat down the tube from the upstream coil to the downstream coil and a temperature difference is produced...

Страница 37: ...etting switch and others valve turn on INT out INLET I Bypass Sensor Ru Rd MASS FLOW CONTROLLER Power Readout 100 0 220V 15V Power Com 15V Amplifier 5 00V 15V Override Valve Valve Drive OUTLET AUTO PU...

Страница 38: ...ns on the panel of D08 series Flow Readout box OFF PURGE and AUTO When it is set to OFF valve of MFC will shut off when it is set to PURGE valve will open to the tip of flow in order to clean the gas...

Страница 39: ...lly check the outer package for any damage incurred during the transportation Check that the delivery is complete and no parts are missing Since the D07 7C can be ordered in Several configuration ensu...

Страница 40: ...ard fittings are used Compression Fitting and VCR there are eight types fittings can be provided a Compression Fitting 3 mm b Compression Fitting 6 mm c Compression Fitting 8 mm d Compression Fitting...

Страница 41: ...front ferrule back ferrule and nut Please note you should use two spanners to operating one spanner for locking the fitting stable and another one for revolving the nut Especially when you dismantle...

Страница 42: ...of connector lead but opposition of serial numbers 7C could possible substitute for 7A cables of 7A could directly connect to 7C but only different of its lock device normally it should change its con...

Страница 43: ...otentiometer had settled it could be used a 3 3K multi turn potentiometer to connect to the external control signal socket of 5 00V and signal common It also could be directly connecting with modulus...

Страница 44: ...hile the first time operating or a long period operating Users could adjust the Zero potentiometer from side face showing in figure 15 or adjust it while removed its overall showing in figure 16 Pleas...

Страница 45: ...excursion happened it should be better adjust zero from zero potentiometer of MFC Figure 11 The Position of Potentiometer of 7C 7CM Another way to adjust zero is potentiometer adjustment from D08 seri...

Страница 46: ...UTO gas supply should be open first and then turn on the power supply the flow rate will not be beyond 5 of presetting after flow soft start about 20 seconds General speaking it should be warming up a...

Страница 47: ...of MFC internal or upper reaches remained gas matching request And then shut off valves open gas supply again and turn it to AUTO position 5 1 3 PC Connection By Displayer Please find the reference in...

Страница 48: ...plying which could adjust zero by zero potentiometer 5 2 3 Gas Supply After zero movement reaches stable MFM Could have gas supply Please pay attention to the flow rate it should be better operate not...

Страница 49: ...gas you should ensure that the fixing and fitting are airtight It becomes necessary to remove the controller from the system purge the controller thoroughly with a dry inert gas such as nitrogen befor...

Страница 50: ...nitrogen Other gas calibrations please inform while your order statements When the nitrogen calibration users use other gas operating it could convert and calculate used gas flow rate by conversion c...

Страница 51: ...I52 0302 For Example 013 N2 007 H2 000 Mixture gases please consult d for detail r r r r Flow Range Full Scale 005C 5SCCM 010C 10SCCM 020C 20SCCM 030C 30SCCM 050C 50SCCM 100C 100SCCM 200C 200SCCM 300C...

Страница 52: ...Horizontal Edge Side Down U Vertical Inlet Up D Vertical Inlet Down d Description Default Value The letters on cover and tag in Chinese Differential Pressure D07 7C 0 1 0 5 MPa 14 5 72 5 psid D07 7CM...

Страница 53: ...1SLM Inlet and Outlet Fittings Compression Fitting 1 4 Seal Materials NEOPRENE Mounting Position Vertical inlet up Customer Special Requirements For Example The letters on cover and tag in English Dif...

Страница 54: ...2 2 Power supply failure Check input output voltages 15VDC 5 00VDC 2 3 Sensor failure Replace the new sensor 2 4 Amplifier or other circuits failure Replace amplifier or repair circuit 3 In case of va...

Страница 55: ...s in accurate 7 1 The range or unit of Display is not matching to controller Re adjust Display 7 2 Bypass is polluted to cause the flow rate excursion Clean MFC and re calibrate it 7 3 Zero excursion...

Страница 56: ...nd particle free which means a filter 30 must be fitted in the gas line upstream of the MFC MFM b Gas must comply with the pressure specifications and never exceed the rated value c Process gas should...

Страница 57: ...0 5318 0 7150 0 719 C2H2 042 0 4049 1 1620 0 581 C2H4 038 0 3658 1 2510 0 598 C2H6 054 0 4241 1 3420 0 481 C3H4 068 0 3633 1 7870 0 421 C3H6 069 0 3659 1 8770 0 398 C3H8 089 0 3990 1 9670 0 348 C4H6...

Страница 58: ...0 Ne 002 0 2464 0 9000 1 415 NH3 029 0 5005 0 7600 0 719 NO 016 0 2378 1 3390 0 976 NO2 026 0 1923 2 0520 0 741 N2O 027 0 2098 1 9640 0 709 O2 015 0 2196 1 4270 0 992 PCl3 193 0 1247 6 1270 0 358 PH3...

Страница 59: ...heat of the gas N Structure factors of gas molecule See Table 5 Table 5 Gas Molecule Composing factors COMPOSITION EXAMPLE N VALUE Single atom numerator Ar He 1 01 Double atom numerator CO N2 1 00 Tr...

Страница 60: ...les sevenstar com cn Shanghai Office Rm 722 Bldg 29 No 368 Zhangjiang Rd Pudong New Area Shanghai China Tel 86 21 63532370 Fax 86 21 63533265 Shenzhen Office Room 712 Section B Qiche Tower No 45 Zhenh...

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