RAYLASE AXIALSCAN, Руководство пользователя

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Data Sheet 3-Axis Subsystems for Laser Beam Deflection FOCUSSHIFTER
03/2013 FOCUSSHIFTER
AXIALSCAN-30-Y [260]
General Specifications
Power Supply
Voltage ±15 V to ±18 V
Interface Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital XY2-100 Protocol
Ripple/Noise Max. 200 mVpp, @20MHz
bandwidth Max. Input Aperture 15 mm
Field Size 260x260 mm ² to 600x600 mm ²
Beam optimized
Ambient Temperature +15 °C to +35 °C
Lens Positions
Storage Temperature -10 °C to +60 °C
Humidity ≤ 80 % non condensing
Weight approx. 16.5 kg
Specifications for Linear-Translator-Modules
Field Size 260 x 260 mm ² 300 x 300 mm ² 400 x 400 mm ² 500 x 500 mm ² 600 x 600 mm ²
Mechanical Data:
Distance D
1)
135 mm 128 mm 116 mm 109 mm 104 mm
Working Distance
2)
282 mm 332 mm 455 mm 579 mm 703 mm
Dynamic Data:
Spot Diameter 1/e
3)
22.9 µ m 26.15 µ m 34.27 µ m 42.39 µ m 50.5 µ m
Resolution < 8 µ m < 10 µ m < 13 µ m < 16 µ m < 19 µ m
1) From the font edge of the linear translator to the inner side of the housing plate, 2) From the bottom edge of the deflection unit to the processing field; the
distance will vary with laser divergence and lens tolerance. 3) Input Beam Quality: M
2
= 1.0
Specifications Deflection Unit
TS-II-30 SS-III-30
Mechanical Data:
Beam Displacement 35.7 mm 35.4
4)
/36.0
Dynamic Data:
Typical Deflection 35.7 mm ±0.393 rad
Repeatability (RMS) 2 µ rad < 2 µ rad
Max. Gaindrift
1)
< 70 ppm/K < 15 ppm/K
Max. Offsetdrift
1)
< 35 µ rad/K < 10 µ rad/K
Long-term Drift
1,2)
< 400 µ rad
Long-term Drift with water tempering
[W] [W2]
1,2,3)
< 60 µ rad
3)
Mirrors QU SI SC BE
Tunings LN RA LN RA LN RA LN RA
Acceleration Time (10-90%) (ms) ≤ 0.90 ≤ 0.90 ≤ 0.77 ≤ 0.85 ≤ 0.76 ≤ 0.60 ≤ 0.52 ≤ 0.56 ≤ 0.49
1) Drift per Axis, 2) After warming-up, variations of ambient temperature < 1K, variations of cooling water < 1K 3) with water tempering at 4.5 l/min and
22˚C water temperature after 0.5 h warm up 4) Specification for QU fused Silica mirrors
Specifications for Optics
Nd:YAG
Wavelength 1,064 nm
Coating AR Coating
Max. Laser Power, cw, W/cm
2
1000 W/cm
2
Beam
Moving
Lens
Focusing
Lens