RAYLASE AXIALSCAN, Руководство пользователя

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Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
03/2013
AXIALSCAN-30-C [100BO]
General Specifications
Power Supply
Voltage ±15 to ±18 V Interface
Signals
Analog ±5 V, ±10 V
Current 7.5 A, RMS, max. 10 A Digital XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture 15 mm
Field Size
100x100 to 500x500 mm ²
beam optimized
Ambient Temperature +15 to +35 °C
Lens Positions
Storage Temperature -10 to +60 °C
Humidity ≤ 80 % non-condensing
Weight approx. 13.5 kg
Specifications for Linear Translator Modules
Field size 100 x 100 mm ² 200 x 200 mm ² 300 x 300 mm ² 400 x 400 mm ² 500 x 500 mm ²
Mechanical Data:
Distance D
1)
177.9 mm 132.0 mm 114.8 mm 105.5 mm 99.7 mm
Working Distance
2)
77.0 mm 201.0 mm 325.0 mm 449.0 mm 572.0 mm
Dynamic Data:
Spot Diameter 1/e
3)
96 µ m 173 µ m 250 µ m 327 µ m 403 µ m
Resolution < 4 µ m < 7 µ m < 10 µ m < 13 µ m < 16 µ m
Acceleration Time ≤ 3 ms ≤ 3 ms ≤ 3 ms ≤ 3 ms ≤ 3 ms
Focus Range in Z Direction ----- 34 mm 111 mm 248 mm 473 mm
1) from the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
2
= 1,0
Specifications for associated Deflection Units
TURBOSCAN-30
SUPERSCAN-IIE-30 SUPERSCAN-III-30
Mechanical Data:
Beam Displacement
35.7mm
35.38
4)
/35.82 mm 35.4
4)
/36.0 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad ±0.393 rad
Repeatability (RMS)
2 µ rad
2 µ rad 2 µ rad
Max. Gaindrift
1)
70 ppm/K
15 ppm/K 15 ppm/K
Max. Offsetdrift
1)
35 µ rad/K
10 µ rad/K 10 µ rad/K
Long-term Drift
1,2)
< 400 µ rad
< 150 µ rad
Long term Drift with water
tempering
[W] [W2]
1,2,3)
< 100 µ rad < 60 µ rad
3)
Mirrors QU SI SC BE QU SI SC BE
Tunings LN RA LA RN LA RN LA RN
Acceleration Time (10-90%) (ms)
0.90
0.90 0.84 0.52 0.50 0.90 0.77 0.85 0.76 0.60 0.52 0.56 0.49
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) Specification for Qu fused Silica mirrors
Specifications for Optics
CO
2
Wavelength 10,600 nm
Coating AR Coating
Max. Laser Power, cw 700 W/cm
2