Functional description
Chapter 4
MN025 / v2.1.0
3-Axis Subsystems for Laser Beam Deflection
25
Fig. 9
Linear translator
module of sub-
system:
AXIALSCAN
(water-cooled)
1 Linear translator
3 Focusing lens
2 Clamping screw (field size adjustment)
4 Adjusting screw (field size adjustment)