RAYLASE AXIALSCAN, Руководство пользователя

Страница: 63 / 71

Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
03/2013
AXIALSCAN-30-C [300BO]
General Specifications
Power Supply
Voltage ±15 to ±18 V Interface
Signals
Analog ±5 V, ±10 V
Current 7.5 A, RMS, max. 10 A Digital XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture 15 mm
Field Size
300x300 to 750x750 mm ²
beam optimized
Ambient Temperature +15 to +35 °C
Lens Positions
Storage Temperature -10 to +60 °C
Humidity ≤ 80 % non-condensing
Weight approx. 13.5 kg
Specifications for Linear Translator Modules
Field size 300 x 300 mm ² 400 x 400 mm ² 500 x 500 mm ² 600 x 600 mm ² 750 x 750 mm ²
Mechanical Data:
Distance D
1)
206.0 mm 187.0 mm 175.0 mm 167.0 mm 159.0 mm
Working Distance
2)
325.0 mm 448.0 mm 572.0 mm 696.0 mm 882.0 mm
Dynamic Data:
Spot Diameter 1/e
3)
200.0 µ m 265.0 µ m 330.0 µ m 390.0 µ m 490.0 µ m
Resolution < 10 µ m < 13 µ m < 16 µ m < 19 µ m < 23 µ m
Acceleration Time ≤ 3 ms ≤ 3 ms ≤ 3 ms ≤ 3 ms ≤ 3 ms
1) From the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
2
= 1,0
Specifications for associated Deflection Units
TURBOSCAN-30
SUPERSCAN-IIE-30 SUPERSCAN-III-30
Mechanical Data:
Beam Displacement
35.7mm
35.38
4)
/35.82 mm 35.4
4)
/36.0 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad ±0.393 rad
Repeatability (RMS)
2 µ rad
2 µ rad 2 µ rad
Max. Gaindrift
1) 70 ppm/K
15 ppm/K 15 ppm/K
Max. Offsetdrift
1)
35 µ rad/K
10 µ rad/K 10 µ rad/K
Long-term Drift
1,2)
< 400 µ rad
< 150 µ rad
Long term Drift with water
tempering
[W] [W2]
1,2;3)
< 100 µ rad < 60 µ rad
3)
Mirrors QU SI SC BE QU SI SC BE
Tunings LN RA LN RA LN RA LN RA
Acceleration Time (10-90%) (ms)
0.90
0.90 0.84 0.52 0.50 0.90 0.77 0.85 0.76 0.60 0.52 0.56 0.49
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) Specification for Qu fused Silica mirrors
Specifications for Optics
CO
2
Wavelength 10,600 nm
Coating AR Coating
Max. Laser Power, cw 700 W/cm
2