RAYLASE AXIALSCAN, Руководство пользователя

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Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
03/2013
AXIALSCAN-20-Y [200]
General Specifications
Power Supply
Voltage ±15 to ±18 V Interface
Signals
Analog ±5 V, ±10 V
Current 7.5 A, RMS, max. 10 A Digital XY2-100 Protocol
Ripple/noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture 15 mm
Field Size 200x200 to 600x600 mm ²
Ambient Temperature +15 to +35 °C
Lens Positions
Storage Temperature -10 to +60 °C
Humidity ≤ 80 % non-condensing
Weight approx. 12.0 kg
Specifications for Linear Translator Modules
Field size 200 x 200 mm ² 300 x 300 mm ² 400 x 400 mm ² 500 x 500 mm ² 600 x 600 mm ²
Mechanical Data:
Distance D
1)
122.3 mm 98.07 mm 85.61 mm 78.04 mm 72.95 mm
Working Distance
2)
221.1 mm 344.9 mm 468.6 mm 592.4 mm 716.1 mm
Dynamic Data:
Spot Diameter 1/e
3)
29.9 µ m 44 µ m 58.2 µ m 72.3 µ m 86.3 µ m
Resolution < 7 µ m < 10 µ m < 13 µ m < 16 µ m < 19 µ m
Acceleration Time ≤ 3 ms ≤ 3 ms ≤ 3 ms ≤ 3 ms ≤ 3 ms
Focus Range in Z Direction 8.0 mm 56.0 mm 143.0 mm 280.0 mm 486.0 mm
1) From the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
2
= 1,0
Specifications for associated Deflection Units
SUPERSCAN-20 SUPERSCAN-IIE-20L
Mechanical Data:
Beam Displacement 26.0 mm 25.63
3)
/26.28 mm
Dynamic Data:
Typical Deflection ±0.393 rad ±0.393 rad
Repeatability (RMS) 3 µ rad 2 µ rad
Max. Gaindrift
1)
50 ppm/K 15 ppm/K
Max. Offsetdrift
1)
30 µ rad/K 10 µ rad/K
Long-term Drift
1,2)
< 300 µ rad < 150 µ rad
Long-term Drift with water tempering
[W] [W2]
1,2,)
< 100 µ rad
Mirrors QU SI BE
Acceleration Time (10-90%) (ms) ≤ 0.6 ≤ 0.58 ≤ 0.61 ≤ 0.40
1) Drift per axis 2) after warming-up, variations of ambient temperature < 1K , variations of cooling water <1K 3) Specification for Qu fused Silica mirrors
Specifications for Optics
Nd:YAG
Wavelength 1,064 nm
Coating AR Coating
Max. Laser Power, cw 1000 W/cm
2
Max. Laser Power, 100ns Pulse
Width
500 MW/cm
2