RAYLASE AXIALSCAN, Руководство пользователя

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Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
09/2014
AXIALSCAN-20-C [100]
General Specifications
Power Supply
Voltage ±15 to ±18 V Interface
Signals
Analog ±5 V, ±10 V
Current 7.5 A, RMS, max. 10 A Digital XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture 15 mm
Field Size 100x100 to 500x500 mm ²
Ambient Temperature +15 to +35 °C
Lens Positions
Storage Temperature -10 to +60 °C
Humidity ≤ 80 % non-condensing
Weight approx. 12.0 kg
Specifications for Linear Translator Modules
Field size 100 x 100 mm ² 200 x 200 mm ² 300 x 300 mm ² 400 x 400 mm ² 500 x 500 mm ²
Mechanical Data:
Distance D
1)
83.1 mm 129.93 mm 147.84 mm 157.28 mm 163.11 mm
Working Distance
2)
89.7 mm 213.4 mm 337.2 mm 460.9 mm 584.7 mm
Dynamic Data:
Spot Diameter 1/e
3)
154.0 µ m 278.1 µ m 402.0 µ m 525.4 µ m 648.3 µ m
Resolution < 4 µ m < 7 µ m < 10 µ m < 13 µ m < 16 µ m
Acceleration Time ≤ 3 ms ≤ 3 ms ≤ 3 ms ≤ 3 ms ≤ 3 ms
Focus Range in Z Direction ------- 32.0 mm 107.0 mm 242.0 mm 463.0 mm
1) From the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
2
= 1,0
Specifications for associated Deflection Units
SUPERSCAN-20 SUPERSCAN-IIE-20L
Mechanical Data:
Beam Displacement 26.0 mm 25.63
3)
/26.28 mm
Dynamic Data:
Typical Deflection ±0.393 rad ±0.393 rad
Repeatability (RMS) 3 µ rad 2 µ rad
Max. Gaindrift
1)
< 50 ppm/K < 15 ppm/K
Max. Offsetdrift
1)
< 30 µ rad/K < 10 µ rad/K
Long-term Drift
1,2)
< 300 µ rad < 150 µ rad
Long-term Drift with water tempering
[W] [W2]
1,2,)
< 100 µ rad
Mirrors QU SI BE
Acceleration Time (10-90%)
(
ms) ≤ 0.6 ≤ 0.58 ≤ 0.61 ≤ 0.40
1) Drift per axis 2) after warming-up, variations of ambient temperature < 1K , variations of cooling water <1K 3) Specification for QU fused Silica mirrors
Specifications for Optics
CO
2
Wavelength 10,600 nm
Coating AR Coating
Max. Laser Power, cw 700 W/cm
2