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Data Sheet 3-Axis Subsystems for Laser Beam Deflection AXIALSCAN HP
03/2013
AXIALSCAN-30-C [600HP]
General Specifications
Power
Supply
Voltage ±15 to ±18 V
Interface
Signals
Analog ±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital XY2-100 Protocol
Ripple/Noise Max. 200 mVpp,
@20MHz bandwidth Input Aperture (fbd) 20 mm
Field Size
600x600 to 1200x1200 mm ²
beam optimized
Ambient Temperature +15 to +35 °C
Lens Position
Storage Temperature -10 to +60 °C
Humidity
≤ 80 % non-
condensing
Weight approx 16.5 kg
Specifications for Linear Translator Modules
Field size 600 x 600 mm ² 800 x 800 mm ² 1000 x 1000 mm ² 1200 x 1200 mm ²
Mechanical Data:
Distance D
1) 162 mm 143 mm 131 mm 123 mm
Working Distance
2)
694 mm 941 mm 1189 mm 1436 mm
Dynamic Data:
Spot Diameter 1/e
3) 492 µ m 653 µ m 813 µ m 974 µ m
Resolution
< 20 µ m < 27 µ m < 34 µ m < 40 µ m
Acceleration Time
≤ 2.5 ms ≤ 2.5 ms ≤ 2.5 ms ≤ 2.5 ms
1) from the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
2
= 1,0
Specifications for associated Deflection Units
SUPERSCAN-IIE-30 SUPERSCAN-III-30
Mechanical Data:
Beam Displacement 35.38
4)
/35.82 mm 35.4
4)
/36.0 mm
Dynamic Data:
Typical Deflection ±0.393 rad ±0.393 rad
Repeatability (RMS) 2 µ rad 2 µ rad
Max. Gaindrift
1)
15 ppm/K 15 ppm/K
Max. Offsetdrift
1)
10 µ rad/K 10 µ rad/K
Long-term Drift
1,2)
< 150 µ rad
Long term Drift with water tempering
[W] [W2]
1,2,3)
< 100 µ rad < 60 µ rad
3)
Mirrors QU SI SC BE QU SI SC BE
Tunings LN RA LN RA LN RA LN RA
Acceleration Time (10-90%) (ms) 0.90 0.84 0.52 0.50 0.90 0.77 0.85 0.76 0.60 0.52 0.56 0.49
2) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) specification for QU fused Silica mirrors
Specifications for Optics
CO
2
Wavelength
10,600 nm
Coating
AR Coating
Max. Laser Power 1/e ² , cw
700 W/cm
2