Functional description
Chapter 4
MN025 / v2.1.0
3-Axis Subsystems for Laser Beam Deflection
23
1 Linear translator module
2 Beam input
3 Lens with linear movement
4 Focusing lens (or 2x, depending on model)
5 Deflection unit
6 Beam output with F-Theta lens
7 Operating field
8 Galvanometer scanner with mirror
9 Digital output
10 Power supply
11 Digital input
12 Connecting cable
13 Digital interface of deflection unit
Fig. 6
FOCUSSHIFTER
(
standard
)