MG14 operating manual Rev 1.4
10
10 Torr:
1x10
-3
…..1x10
1
Torr
100 Torr:
1x10
-2
…..1x10
2
Torr
1000 Torr:
1x10
-1
…..1x10
3
Torr
THERMOVAC transmitters:
5x10
-4
….1x10
3
mbar
IONIVAC transmitters ITR90:
5x10
-10
…. 5x10
-4
mbar
2.3.4 Measuring Technique
Accuracy of measurement
Current: (channel 1)
- Relative to current
reading: ±1%
-
Absolute: ±0.6 fA
Voltage:(channel 2)
- Relative to voltage
reading: ±0.3%
-
Absolute: ±2 mV
Measuring rate
Channel 1 ( B-A gauge):
2 mA.10 pA 25 s
-1
10 pA.100 fA 1.25 s
-1
< 100 fA 2.5 s
-1
Channels 2 (transmitters):
Entire range 20 s
-1
Display rate, temperature drift, unit of measurement
Display rate 4 s
-1
Temperature drift < 0.1 % per °C
Unit of measurement mbar, Pa, Torr, Micron
Resolution of the A/D converter
THERMOVAC, CERAVAC and IONIVAC:
bit
Extractor, B-A Gauge
bit
2.4 Interfaces
2.4.1 Relay Outputs
Name
Relay
Connection:
D-Sub, 9 pins, female.
See Fig. 3-8,
Number of relays:
4 NO, include one NO,NC
Response time Max.
70 ms,
Synchronous to channels:
adjustable to 1,2,3 or 4; above, bellow and hysteresis option
Load (ohmic):
Max. 50 VDC, 0.5 A
2.4.2 I/O outputs
For detailed description please refer to chapter 3.3.9