13 Appendix
H-845 Hexapod System
MS222E
Version: 2.1.1
77
13.1 Explanations of the Performance Test Sheet
The hexapod is tested for the positioning accuracy of the translational axes before
delivery. The performance test sheet is included in the scope of delivery.
The following figure shows the test setup used.
Figure 32: Test setup for measuring the X or Y axis.
1
Laser interferometer
2
Mirror
3
Bench
The following test cycles are performed:
Movement over the entire travel range with at least 20 measuring points, in at
least five cycles.
Movement over partial sections, e. g. ±1 mm in increments of for example,
10 µm
13 Appendix
