Pfeiffer Vacuum TPH 1600 Скачать руководство пользователя

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Weiteres Zubehör

Additional accessories

Accessoires additionnels

Antriebselektronik

Electronic drive unit

Commande électronique

TCP 380

PM C01 490

Antriebselektronik

Electronic drive unit

Commande électronique

TCP 600

PM C01 320

Anschlußkabel Turbo-

Connection cable turbo-

Câble de raccordement

PM 031 603 -T

TCP 380, 3 m

turbo-TCP 380, 3 m

Anschlußkabel Turbo-

Connection cable turbo-

Câble de raccordement

PM 031 703 -T

TCP 600, 3 m

turbo-TCP 600, 3 m

Splitterschutz

Splinter shield

Pare-éclats

DN 200

PM 006 923 -T

DN 250

PM 006 924 -T

Dämpfungskörper TPH

Vibration compensator TPH

Amortisseur TPH

DN 200 ISO-K

PM 006 668 -X

Dämpfungskörper TPH

Vibration compensator TPH

Amortisseur TPH

DN 250 ISO-K

PM 006 670 -X

Dämpfungskörper TPU

Vibration compensator TPU

Amortisseur TPU

DN 200 CF-F

PM 006 669 -X

Dämpfungskörper TPU

Vibration compensator TPU

Amortisseur TPU

DN 250 CF-F

PM 006 671 -X

Zentrierring Vi für TPH

Centering ring Vi for TPH

Anneau de centrage Vi pour TPH

DN 250 ISO

BP 213 207 -T

DN 200 ISO

BP 213 205 -T

Überwurfflansch TPH

Rotatable flange TPH

Bride tournante TPH

DN 250 ISO-F

BN 845 073 -T

Überwurfflansch TPH

Rotatable flange TPH

Bride tournante TPH

DN 200 ISO-F

BN 845 112 -T

CU-Dichtung (10 St.)

Copper gasket (10 pcs.)

Joint en cuivre (10 Pc.)

DN 250 CF

BN 845 322 -T

für TPU

for TPU

pour TPU

CU-Dichtung (10 St.)

Copper gasket (10 pcs.)

Joint en cuivre (10 Pc.)

DN 200 CF

BN 845 040 -T

für TPU

for TPU

pour TPU

Schraubensatz TPU

Set of screw TPU

Jeu de vis TPU

DN 250/200 CF

BN 845 014 -T

Injektionspritze

Syringe

Seringue d’injection

PM 006 296 -U

Schlauchnippel

Hose nipple

Collier de jonction

DN 16 ISO-KF-10

BP 217 453

Reduzier-Zentrierring

Reducing centering ring

Anneau de centrage et à

Viton DN 16/10 ISO-KF

BP 213 331 -T

réduction

Anwendung siehe Abschnitt 4.6/For application, see Section 4.6/Applications, voir section 4.6

Содержание TPH 1600

Страница 1: ...rating Instructions Mode d emploi Turbomolekularpumpe f r die Korrosiv Gas Technik Turbomolecular Pump for Corrsosive Gas Processes Pompe turbomol culaire pour corrosif gaz processus TPH 1600 TPU 1600...

Страница 2: ...1 Adjusting the Sealing Gas Flow 4 7 Electrical Connection of the Turbo Pump 5 Circulatory Lubrication 6 Operation 6 1 Switching on the Turbo Pump 6 1 1 Before the first Start 6 1 2 Before each Start...

Страница 3: ...ring Replacement 7 2 Changing the Pump Fluid 7 3 Checking the Drive Motor 7 4 Turbo Pump Bearing Replace ment 7 4 1 Dismantling 7 4 2 Assembly 8 Service Information 8 1 Customer Training 8 2 Returning...

Страница 4: ...4 Notizen Notes...

Страница 5: ...sealing gas valve Pressure at sealing gas valve 1000 1400 mbar The setting of the sealing gas valve must be adjusted for higher pressures Electrical connection in compliance with local regulations X8...

Страница 6: ...acuum and venting connection Stand turbo pump vertically on its synthetic legs and ensure dry storage conditions MAINTENANCE Permanent magnetic bearing high vacuum side maintenance free Ball bearing f...

Страница 7: ...perform repair or maintenance work on units which have come into contact with substances which are detrimental to health please observe the relevant regulations If you return units to us for repair or...

Страница 8: ...work to you if you have not attached the note Free from harmful substances to the unit or in the accompanying papers Harmful substances are defined in European Community Countries as materials and pr...

Страница 9: ...on with the turbo pump Personnel must be able to recognize dangers and take preventive measures Any use by unauthorized personnel or careless handling may increase the potential danger The switch off...

Страница 10: ...nnecting lines between the turbomolecular pump and the backing pump when the system is at standstill so as to avoid any contact with vacuum Before you remove the turbomole cular pump from the system t...

Страница 11: ...a the TCP 380 or TCP 600 Electronic Drive Unit TPH 1600 high vacuum flange DN 200 ISO K or DN 250 ISO K with out heating jacket TPU 1600 high vacuum flange DN 200 CF F or 250 CF F with hea ting jacket...

Страница 12: ...zontal Section 4 2 Rotor stator and magnetic settings and balancing are not altered when bearings are replaced All parts which come into contact with the media are manufactured in corrosion proof mate...

Страница 13: ...e turbomol culaire TPH TPU 1600 TPH TPU 1600 Anschlu nennweite Nominal connection Diam tre nominal des of diameter raccords Eingang Inlet Entr e DN 200 ISO K DN 250 ISO K DN 200 CF F DN 250 CF F Ausga...

Страница 14: ...vide lev DN 250 Fig 2 Hochvakuumanschlu Vorvakuumanschlu Flutanschlu K hlwasseranschlu Anschlu Antriebselektronik Sperrgasanschlu High vacuum connection Fore vacuum connection Venting connection Cooli...

Страница 15: ...s must be determined accordingly We recommend our two stage DUO 120 A Rotary Vane Vacuum Pump with integrated HV safety valve as the standard backing pump 2 3 Pression finale On entend par pression fi...

Страница 16: ...e utmost cleanliness Unclean components increase the pump down time owing to a higher desorption rate If a container is fitted to the high vacuum flange of the turbo pump without support it must be en...

Страница 17: ...pprox 15 20 Fit splinter shield 3 with clamping ring 4 as per Fig 7 in the hollow of high vacuum flange 1 and clamp the clamping ring in the high vacuum flange with the three set screws 27 Si la posit...

Страница 18: ...d during heating air coo ling is not permissible Two PTC resistors provide thermal protection for the pump One PTC resistor is located in the motor win dings and the other in the pump hou sing If the...

Страница 19: ...essure max 7 bar No aggressive carbon dioxide and ammonia should be detectable If the actual values are above or below the levels indicated above and as a result problems arise with or dama ges occur...

Страница 20: ...reils comme ci dessous la soupape de remise l air peut tre ouverte imm diatement ou avec temporisation apr s une coupure de courant ou la mise l arr t Branchement lectrique du dispositif de remise l a...

Страница 21: ...ise l air Fig 10 D visser la vis d a ration du raccord de remise l air 14 G 1 8 Visser la soupape de remise l air 16 avec le raccord G 1 8 1 dans le raccord de remise l air 14 Les soupapes de remise l...

Страница 22: ...required the turbo pump must also be earthed Earthing the Turbo Pump When the turbo pump is separated from the pumping unit and operated with a longer cable an extra cable to the site ground must be...

Страница 23: ...6 Operation 6 1 Switching on 6 1 1 Before the first Start Check if the turbo pump has been fil led with pump fluid as per Section 4 1 6 1 2 Before each Start Open the sealing gas supply Sec tion 4 6 C...

Страница 24: ...13 may open due to degassing of the pump fluid In this case the electronic drive unit switches off the turbo pump It must be restarted by Reset push button S3 on the Electronic Drive Unit TCP 380 or T...

Страница 25: ...throttle the volume flow rate must be fitted This can be achieved either by connecting a conductance control unit or by using a TCP 600 with variable rotation speed option In the latter case a reducti...

Страница 26: ...rive unit If the pump is connected as shown in the wiring diagram see the Elec tronic Drive Unit TCP 380 or TCP 600 Operating Instructions the follo wing operations are performed on switching off the...

Страница 27: ...er does not have such facili ties it is possible to have decontami nation carried out by the manufactu rer against presentation of an invoice Marking and returning toxically conta minated pumps to the...

Страница 28: ...vacuum side Place the turbo pump vertically with the high vacuum flange pointing downward in a suitable vessel Fill cleaning agent pure alcohol into the vessel up to the backing pump flange Fig 12 Im...

Страница 29: ...pump Vent the turbo pump and disconnect from the backing pump Fill the turbo pump with pump fluid Section 7 1 2 The turbo pump is now ready for operation and can be re fitted in the system Initial ev...

Страница 30: ...paliers de la pompe de fluide moteur Fig 13 En cas de d rangement de l alimenta tion de fluide moteur la pompe turbo sera mise l arr t par le contact 33 on peut voir par le hublot 36 si la pompe de f...

Страница 31: ...found replace the bearing as per Fig 13 Clean new bearing 35 in pure alcohol and then moisten with pump fluid F3 and push onto the shaft manually Re fit the complete pump fluid pump in reservoir 43 ta...

Страница 32: ...est adapter and external mains unit DC power supply Feed the Hall probes with a constant current of 40 mA at contacts G and F positive pole at G Check Hall probes by turning the rotor by hand 7 2 Chan...

Страница 33: ...lpumpe mit Betriebsmittel sensor 33 33 Kontakt 83 Interne Steckverbindung Motor Betriebsmittelpumpe 1 bei TCP 600 wei Wiring diagram TCP 380 25 Drive motor with auxiliary motor winding Hall probes and...

Страница 34: ...our customers on a regular basis If you are interested please contact our agencies or subsidiaries Spare parts pack I contains all parts needed for bearing housing replace ments see Section 9 The pump...

Страница 35: ...pposing of the four screws 82 SW 3 from bearing hou sing 51 screw in 2 studs B Fig 20 onto which the two knurled nuts D should be screwed tight Fig 20 Screw out the other two screws 82 SW 3 Screw off...

Страница 36: ...move compensating ring 81 Enlever l anneau de compensation 81 Fig 25 Austauschteile Exchange parts Pi ces de rechange L gende Fig 17 30 31 Bride de vide lev 32 Bride de vide primaire 38 Raccord d eau...

Страница 37: ...up to the stop point Fig 28 Screw in splash nut 49 left hand thread and tighten with the SW 4 Allan key Fig 29 Screw in the two knurled nuts D evenly until bearing housing 51 is pulled against the ax...

Страница 38: ...er part 31 Introduire le ch ssis de palier 51 dans la partie inf rieure 31 Fig 28 Lagerfassung 51 aufschieben Push bearing housing 51 up to the stop Monter le ch ssis de palier 51 Fig 29 Spritzmutter...

Страница 39: ...39 Fig 31 1 48 8 31 68 66 81 83 51 82 49 43 80 32...

Страница 40: ...zers Service Center should pro blems arise All repair orders are carried out on the basis of our General Terms of Delivery only For repairs the warranty period is 6 months Repair work is performed wit...

Страница 41: ...M 053 531 U 61 Quad Ring Quad ring Joint en Quad VI 10 82 x 1 78 1 P 4081 630 C 63 USIT Ring USIT ring Joint en USIT MS NBR U12 7 18 x 1 5 4 P 3529 142 64 O Ring O ring Joint torique VI 36 x 2 2 P 407...

Страница 42: ...42 Fig 32 Fig 33 78 77 65 72 71 76 75 51 36 30 79 49 70 68 74 73 61...

Страница 43: ...ting en cas de montage en rack Eingang Input Entr e PM 001 164 T Ausgang Output Sortie PM 001 165 T Flutventil TSF 0122 Venting Valve TSF 0122 Vanne de remise l air TSF 0122 G 1 8 PM Z01 106 DN 10 ISO...

Страница 44: ...ungsk rper TPU Vibration compensator TPU Amortisseur TPU DN 250 CF F PM 006 671 X Zentrierring Vi f r TPH Centering ring Vi for TPH Anneau de centrage Vi pour TPH DN 250 ISO BP 213 207 T DN 200 ISO BP...

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