Pfeiffer Vacuum TMH 521 P, Руководство по эксплуатации

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9. Technical Data
1) Distance from the pump 1 m
2) Measured at a helium concentration of 100 %, 10 s measurement time
3) Measured with a rotary vane pump 1.5 m3/h; higher throughputs with reduced rotation speed.
4) Rotation speed of pump may drop below the nominal rotation speed.
5) For gas characteristics line please refer to Section 4.4.
6) In accordance with German Industrial Standard 28428 the final pressure which is attained in a
measuring dome 48 hours after baking out.
7) Please see type plate.
8) At maximum gas throughput
9) Protection class IP 54 is afforded for the Electronic Drive Unit TC 600
by refro-fitting a cover plate (please refer to Section 11. Accessories).
Feature Unit TMH 521 P TMU 521 P
Connection nominal diameter
Inlet DN 100 ISO-K DN 160 ISO-K DN 100 CF-F DN 160 CF-F
DN 100 ISO-F DN 160 ISO-F
Outlet DN 25 ISO-KF/G 1/4“ DN 25 ISO-KF/G 1/4“
Venting connection G 1/8” G 1/8”
Nominal rotation speed Hz (1/min) 833 (50 000) 833 (50 000)
Standby rotation speed Hz (1/min) 550 (33 000) 550 (33 000)
Start-up time min 5,5 5,5
Maximum noise level1) dB (A) 50 50
Final pressure, backing pump mbar < 5 < 5
Integral leak rate (He)2) mbar l/s < 1 · 10
-7
< 1 · 10
-7
Maximum permissible rotor temperature °C 90 90
Permissible heat radiaten power W 14 14
Volum flow rate for:
Nitrogen N2 l/s 290 510 290 510
Helium He l/s 400 520 400 520
Hydrogen H2 l/s 380 450 380 450
Argon Ar l/s 260 500 260 500
Compression ration for:
N2 > 1012 > 1012
He 5 · 10
7
5 · 10
7
H2 6,5 · 10
5
6,5 · 10
5
Ar > 1012 > 1012
Maximum fore-vacuum pressure
N2 mbar 13,0 13,0
He mbar 12,5 12,5
H2 mbar 9,0 9,0
Ar mbar 11,0 11,0
Maximum gas throughput3) with water cooling
N2 mbar l/s 4,0 4,0
He mbar l/s 8,0 8,0
H2 mbar l/s 9,5 9,5
Ar mbar l/s 2,0 2,0
Maximum gas throughput at
intake pressure of 0.1 mbar4)
N2 mbar l/s 12,0 12,0
He mbar l/s 12,0 12,0
H2 mbar l/s 8,0 8,0
Ar mbar l/s 12,0 12,0
Vertex power characteristics line5)
A W / Hz 185/833 185/833
B W / Hz 260/485 260/485
C W / Hz 160/833 160/833
D W / Hz 260/435 260/435
Final pressure6)
with rotary vane pumps
mbar < 1 · 10-7 < 5 · 10-10
with diaphragm pumps mbar < 1 · 10-7 < 1 · 10-8
Lubricant TL 011 TL 011
Cooling water consumption
with water at 15 °C7)
l/h 100 100
Cooling water temperature °C 5 - 25 5 - 25
Permissible ambient temperature
with air cooling
°C 0 - 35 0 - 35
Heating power consumption W 100 100
Weight kg 14,5 (ISO-K)/ 13,5 (ISO-K)/ 15,0 14,5
kg 15,0 (ISO-F) 14,2 (ISO-F)
Permissible magnetic field mT 5,0 5,0
Operating voltage VDC 72 ±5% 72 ±5%
Duration8)- / max. current consumption A 3,2/4,2 3,2/4,2
Duration8)- / max. power W 230/300 230/300
Protection class9) IP 30 IP 30
Shipping and storage temperature °C -25 to +55 -25 to +55
Relative humidity % 5-85 non condensing 5-85 non condensing