5
Feature
TMH 521 P
TMU 521 P
High vacuum flange
ISO-K
CF-F
High vacuum seal
Elastomer
Metal
Attainable final
< 1 · 10-7 mbar
< 5 · 10-10 mbar
pressure
(without baking-out)
(with baking-out)
Abbreviations on the type plate of the pump
Suffix ”
P
”:
Pumps with the designation TMH/TMU 521
P
have been designed for the connection
of purge gas (see Section 3.7.).
Improper Use
The following is regarded, inter alia, as improper:
– The pumping of explosive or corrosive gases.
– Operating the pumps in areas where there is a danger of
explosion.
– Operating the pumps in areas where there is a danger of
radioactivity.
– The pumping of gases and vapours which attack the mate-
rials of the pumps.
– The pumping of corrosive gases without sealing gas.
– The pumping of condensating vapours.
– Operations involving impermissibly high levels of gas
loads.
– Operations with impermissibly high fore-vacuum pressure.
– Operations with improper gas modes.
– Operations involving too high levels of heat radiation
power (see Section 9. Technical Data).
– Venting with rates higher than in Section 4.3. stated.
– Operating the pump without the cover plate for the TC 600
in environments which require a protection class superior
to IP 30.
Installation of the pumps in systems where the turbomole-
cular pumps are subjected to impact-like stress and vibra-
tions or the effect of periodically occurring forces.
– The use of other power units or accessories which are not
named in this manual or which have not been agreed by
the manufacturer.
– The connection to power units with earthing of a direct
voltage pole.
The turbomolecular pumps and flange connections must not
be used to tread on when climbing onto the system.
Improper use will cause all claims for liability and guarantees
to be forfeited.
2.2. Differences Between The Pump Types
2.3. Scope Of Delivery
The turbopump scope of delivery includes:
– protective covering for the high vacuum flange and the
fore-vacuum flange.
The 4 screws at the High vacuum flange are not
sufficient for the attachment of the pump at a
recipient (see Section 3.).
CAUTION
