4
2.1. Main Features
Turbopumps TMH 521 P/TMU 521 P with the TC 600 form an
unit. Voltage is supplied by the power supply (see Section 11.
Accessories).
On delivery, the pumps have been set up for
operations in remote mode. Remote plug 8d
should therefore be disconnected if operations
with the DCU 001, DCU 300 or HPU 001 are
required.
☞
PLEASE NOTE
Cooling
Water cooling or air cooling is required (”Accessories”).
Integrated protective measures against excess temperatures:
The Electronic Drive Unit TC 600 reduces
the rotor rotation speed.
Bearings
High vacuum side: wear free permanent magnetic bearing.
Fore-vacuum side: oil circulatory lubricated ball bearing
with ceramic balls.
2. Understanding The Pumps TMH 521 P/TMU 521 P
Ambient conditions
The turbomolecular pump needs to be installed in compliance
with the following ambient conditions:
Installation location:
protected against the weather
(rooms within buildings)
Temperature:
+5 °C to +40 °C
Relative humidity
of the air:
max. 80 % at T
≤
31 °C
up to max. 50% at T
≤
40 °C
Air pressure:
77 kPa - 106 kPa
Installation altitude:
2000 m max.
Pollution degree:
2
Overvoltage category:
II
Connection voltage:
72 VDC ±5%
Proper Use
– The Turbomolecular Pumps TMH 521 P/TMU 521 P may
only be used for the purpose of generating vacuum.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used.
If the pump is to be operated with more than 50% of the
permissible gas load then sealing gas should be used to
ensure rotor cooling.
– The turbopump must be connected to a backing pump in
accordance with Section 3.3.
– Only Pfeiffer Vacuum power supplies may be used to
operate the TC 600. The use of other power supplies
requires the express agreement of the manufacturer and
equalisation with the valid specification.
– Without the cover plate for the TC 600 the pumps may only
be operated providing the ambient conditions in
compliance with Protection Type IP 30 are observed.
Turbomolecular Drag Pump TMH 521 P/TMU 521 P
1
High vacuum flange
2
Fore-vacuum flange
4
Venting screw
8
Electronic Drive Unit TC 600
8d Remote plug
1
2
4
8d
8
