4 Product description
4.1 Product identification
To correctly identify the product when communicating with our service center, always have the informa-
tion from the product rating plate available (see chapter "Labels").
4.1.1 Scope of delivery
● 1 magnetically levitated turbomolecular pump with integrated electronic drive unit
● 1 splinter shield (in the pump inlet flange)
● 1 water solenoid valve (MT version)
● 1 operating instructions and a sheet of safety labels
and, depending on the ordering guide, the following components are present:
● 1 copper gasket
● 1 set of screws and bolts
● 1 purge solenoid valve
Unless they have been ordered, the hand-held remote control (HHR) and 48 VDC power
supply are not included in the order. To order, refer to the Accessories chapter.
4.1.2 Product applications
The pump manufacturer has developed a range of reliable, high performance magnetically levitated tur-
bopumps with active magnetic bearings (AMB) and compression stages. They are specially adapted for
coating and dry-etching plasma processes, for glass coating as well as for R&D applications. These
pumps are equipped with an integrated electronic drive unit.
These pumps are characterized by their resistance to corrosion, robustness, high gas throughput at
high operating pressure and lack of maintenance requirements.
For more detailed information on specific applications, please contact us.
Rotation speed
The magnetically levitated pump rotation speed can be selected and set between a minimum speed and
the nominal speed. This makes it possible to optimize pumping characteristics according to each appli-
cation (for example, high pressure pumping). A distinction is made between the following speeds:
● Selected rotation speed (= Stand-by speed) between minimum speed and the nominal rotation
speed
● Nominal rotation speed set in the factory
M version pump
Standard version is suitable for the most of the clean applications. This pump version has no tempera-
ture management system (no TMS).
This pump version is available in an air- or water-cooled option.
MT version pump
This MT version is recommended for any application where high temperature for the pump and gases
are demanded in order to minimize the condensation in the pump. This pump version is equipped with a
temperature management system (TMS). The temperature management is controlled via the integrated
electronic drive unit.
Product description
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