6 Operation
6.1 Preliminary precautions for use
WARNING
Risk of poisoning when process gases are present in the atmosphere
The manufacturer has no control over the types of gases used with the pump. Process gases are of-
ten toxic, flammable, corrosive, explosive and/or otherwise reactive. There is a risk of serious or fatal
injury if these gases are allowed to escape freely into the atmosphere.
► Apply the relevant safety instructions in accordance with local regulation. This information is
available from the operator’s safety department.
►
Always connect the turbomolecular pump’s exhaust to a backing pump compatible with
process gases
: the backing pump’s exhaust is connected to the installation’s dangerous gas ex-
traction system
► Regularly check that there are no leaks where the pump connects to the exhaust pipework.
WARNING
Risk of electric shock in the event of electrical disconnection while the pump is running
The turbomolecular pump and its electronic drive unit cannot be disconnected from the electrical net-
work before the rotor completely stops rotating: the pump/electronic drive unit must be isolated from
the electrical network to prevent electric shock!
1. Stop the pump from rotating by sending a
‘Stop’
order on the control interface.
2. Wait for the rotor to completely stop rotating (several minutes).
3. Switch off customer power supply from the equipment.
4. Unplug the mains cable.
WARNING
Risk of cutting injuries due to contact with sharp edges via the high vacuum flange
Sharp components can be accessed via the inlet flange. Rotor and stator blades on turbomolecular
pumps have very sharp edges.
► Before starting any work on the product, wait for the pump to come to a complete standstill.
► Always keep the splinter shield in the inlet housing, as it limits the risk of injury.
► Always wear protective gloves in accordance with standard EN 420.
►
Never disconnect the high vacuum flange before the rotor is completely immobilized
.
Pumping pyrophoric or flammable gases may be hazardous. Product users and/or integrators must
comply with the safety instructions (see chapter “Safety instructions relating to flammable/pyrophoric
materials”). Every time the pump is commissioned:
1. Check that the pump has been correctly secured in accordance with safety instructions (see chap-
ter “Equipment installation conditions”).
2. Check that the pump inlet is properly connected to the pumping line.
3. Start the water and nitrogen circuits.
4. Check that the exhaust pipework is not clogged and that all the extraction system valves are
open.
5. Check that the valves supplied by the customer are connected and supplied, including the purge
valve (where applicable).
6. Check that the heater band and the water solenoid valve are connected to the electronic drive unit
(MT Version pump).
7. Check that the fan is powered (where applicable).
Operation
38/78
