Pfeiffer Vacuum ATH 1603 M, Руководство по эксплуатации

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Technical data Units ATH 500 M ATH 500 M ATH 500 MT
Pumping speed N2 l/s 350 550 550
Ar l/s 320 530 530
He l/s 310 390 390
H2 l/s 170 190 190
Compression ratio N2
> 2 · 10 7 > 2 · 10 7 > 2 · 10 7
Ar
> 8 · 10
6
> 8 · 10
6
> 8 · 10
6
He
> 1 · 10 4 > 1 · 10 4 > 1 · 10 4
H2
> 2 · 10
2
> 2 · 10
2
> 2 · 10
2
Maximum flow 2) 3) 4)
N2 hPa l/s 67.6 67.6 8.5
Ar hPa l/s 42.2 42.2 5
He hPa l/s > 169 > 169 > 16.9
H2 hPa l/s > 169 > 169 > 16.9
Maximum pressure at
inlet 4)
N2 hPa 1 1 0.04
Ar hPa 1 1 0.02
He hPa 10 10 > 0.1
H2 hPa 10 10 > 0.1
Maximum pressure at
exhaust 5)
N2 hPa 2.6 2.6 2.6
Ar hPa 3.3 3.3 3.3
He hPa 1 1 1
H2 hPa 0.25 0,25 0.25
Ultimate pressure 6) hPa < 1 · 10 -8 < 1 · 10 -8 < 1 · 10 -8
Nominal rotation
speed
min -1 (Hz)
50 000 (833) 50 000 (833) 50 000 (833)
Stand-by speed
min -1 (Hz)
15 000 (250) to
50 000 (833)
15 000 (250) to
50 000 (833)
15 000 (250) to
50 000 (833)
Maxi. bake-out tem-
perature
°C 120 120 -
Maxi. regulation tem-
perature 7)
°C - - 65
Leak rate hPa l/s < 5 · 10 -8 < 5 · 10 -8 < 5 · 10 -8
Purge flow rate 2)
sccm 50 50 50
Supply voltage VDC 48 48 48
Start-up time 8)
mn < 2 < 2 < 2
Start up power Watt < 560 < 560 < 560
Power consumed at
ultimate pressure
Watt < 100 < 100 < 100
Power at minimum
stand-by speed
Watt < 50 < 50 < 50
Vibration level (at
nominal speed)
µm < 0.01 < 0.01 < 0.01
Sound level dB(A) < 42 < 42 < 42
Water cooling flow l/mn 1 1 1
1) The products that have customer specificities may have different characteristics.
2) Standard reference conditions: T0 = 273,15 K - P0 = 1013.25 hPa.
3) At nominal speed with 25 °C water cooling temperature.
4) With an exhaust pressure < 0.4 hPa, depends on external conditions (temperature, water flow rate, ambient tempera-
ture). For other conditions, contact us
5) Reduced maximum flow rate, ultimate pressure at exhaust without loss of flow rate speed. Depends on environmental
conditions.
6) With ISO-F flange (best with CF-F flange). Contact us.
7) This maximum temperature influences the maximum flow, contact us.
8) Up to 90 % of full rotation speed, with exhaust pressure < 0.1 hPa.
Technical data and dimensions
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