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MKS Instruments UK Ltd

V2000-P Hardware Manual

– SP102006.103 March 2013

5

Table of Contents

Additional Installation Maintenance and Operating Instructions .................................................................. 3

Installation .................................................................................................................... 4
Operation ................................................................................................................... 4
Maintenance .............................................................................................................. 4

Table of Contents ......................................................................................................... 5

Health & Safety ............................................................................................................ 6

Warning Symbols ....................................................................................................... 7
Fuses .......................................................................................................................... 7
Electrical Connections ................................................................................................ 7

Installation................................................................................................................... 8

Initial checks .............................................................................................................. 8
Dimensions ................................................................................................................ 9
System Components ................................................................................................ 10
Vacuum system installation ..................................................................................... 11

RGA vacuum chamber overview ...................................................................... 11
Main chamber installation ............................................................................... 12
Connecting the backing pump ......................................................................... 12
Heater jacket .................................................................................................... 12
Microvision 2 installation ................................................................................. 12

Electrical installation ................................................................................................ 13

Electrical specification ..................................................................................... 13
Equipment rack ................................................................................................ 13
Interconnecting cables ..................................................................................... 13
Mains power .................................................................................................... 13
RCV Connections .............................................................................................. 14
System Box Connections .................................................................................. 14

Connecting to the process tool (VacOK) .................................................................. 15
PC Connection .......................................................................................................... 15
Operation ................................................................................................................. 16

Overview .......................................................................................................... 16
Start up ............................................................................................................ 17
Leak checking ................................................................................................... 18
Heating and Baking .......................................................................................... 19
System shut down procedure .......................................................................... 20

Maintenance.............................................................................................................. 21

Operating pressure .......................................................................................... 21
Accessing the orifice disk ................................................................................. 21
Refitting the inlet flange .................................................................................. 21

Replacing the orifice ................................................................................................ 22

Orifice Disk Tools ............................................................................................. 22
Fitting the Tool Guide ...................................................................................... 23
Removing the Orifice Disk ................................................................................ 23
Fitting a new Orifice Disk ................................................................................. 24
Re-assembling the Inlet Flange ........................................................................ 25
Vision 2000-P electronics ................................................................................. 26
Diaphragm pump maintenance ....................................................................... 27
Turbo pump maintenance ............................................................................... 27

Mass spec maintenance ........................................................................................... 28

Removing the analyser ..................................................................................... 28
Re-fitting the analyser ...................................................................................... 28

Returning Your Equipment ...................................................................................... 29

Support Contact Numbers ............................................................................... 29
Health and safety clearance form .................................................................... 29

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Содержание Spectra Vision 2000-P

Страница 1: ...MKS Instruments UK Ltd V2000 P Hardware Manual SP102006 103 March 2013 1 Vision 2000 P Manual SP102006 103 March 2013...

Страница 2: ...United Kingdom Tel 44 0 1270 250150 You can obtain UK support for this product from the following location MKS Instruments UK Ltd Spectra Products 3 4 Cowley Way Crewe Cheshire CW1 6AG United Kingdom...

Страница 3: ...MKS Instruments UK Ltd V2000 P Hardware Manual SP102006 103 March 2013 3...

Страница 4: ...C and safety issues The vacuum system on which the analyser RF head is mounted must be earthed to a protective earth preferably to the same protective earth as the control unit Operation The equipment...

Страница 5: ...nt rack 13 Interconnecting cables 13 Mains power 13 RCV Connections 14 System Box Connections 14 Connecting to the process tool VacOK 15 PC Connection 15 Operation 16 Overview 16 Start up 17 Leak chec...

Страница 6: ...these boxes is described below WARNING WARNING boxes are used where failure to observe the instructions could result in personal injury or death CAUTION CAUTION boxes are used where failure to observe...

Страница 7: ...C2 User Manual for the fuse locations and values Electrical Connections The Vision 2000 P must be powered down and isolated from the mains power supply before any electrical connections are made On th...

Страница 8: ...to be fitted the type of process to be monitored and the pressure regime from which the system will be sampling The design variations are purely to give the user the best possible system to meet the n...

Страница 9: ...MKS Instruments UK Ltd V2000 P Hardware Manual SP102006 103 March 2013 9 Dimensions 562mm 225mm 290mm 179mm...

Страница 10: ...0 P Hardware Manual SP102006 103 March 2013 10 System Components Item Ref Description 1 RGA Chamber 2 Chamber Mounting Flange 3 Isolation Valve 4 System Interface Module LM108 5 Turbo Molecular Pump 6...

Страница 11: ...the right angled valve contains the orifice disk holder which provides a relatively high degree of pressure reduction between the process chamber and the RGA sampling chamber along with the fixing for...

Страница 12: ...sing a KF16 centring O ring and clamp Heater jacket The Vision 2000 P is supplied with the heater jacket fitted There is no need to remove the heater jacket during the installation and testing procedu...

Страница 13: ...ub rack The sub rack should be fitted into a 19 inch equipment rack using four M6 screws plastic cup washers and cage nuts Interconnecting cables All the cables which run between the equipment rack an...

Страница 14: ...loom to Interface Module System Box System 3 Main wiring loom to Interface Module System Box Turbo Pump Turbo pump control module ECU Power Microvision2 Power Digital IO Microvision2 Digital IO Backin...

Страница 15: ...guration of the Vision 2000 P inlet please refer to the shipment report for the maximum process pressure The Vision 2000 P has been configured to connect to a no volts relay contact when the contact i...

Страница 16: ...stallation quickly the turbopump may be started and Bakeout initiated directly from the RVC2 panel without use of the computer software The operation of the vacuum system controller is fully described...

Страница 17: ...RVC window will change from yellow to green Note that the turbopump controller will be programmed to a set point of 95 of rated speed After the turbopump has reached full speed you may switch the RGA...

Страница 18: ...do Run a Leak Hunt recipe in Process Eye and check that the probe gas is set to mass 4 for helium or the appropriate mass if you are using another gas As the Vision 2000 P uses a Microvision2 there ca...

Страница 19: ...with the filament on but MUST be using the faraday detector DO NOT use the multiplier detector during baking DO NOT use the electron multiplier detector within the first two hours after terminating b...

Страница 20: ...lined below to shut down and switch off the Vision 2000 P system 1 Switch off the RGA filament and wait for 15 minutes for the filament to cool down 2 Switch off the turbo pump from the RVC2 Window wi...

Страница 21: ...rface coupling flange between the ion source and the inlet isolation valve This extends the maximum process monitoring pressure directly in proportion to the pressure reduction Please refer to the shi...

Страница 22: ...part of the V2000P toolkit Do not attempt to remove or insert an orifice disk without using these tools If they are missing from your toolkit please contact your local MKS Spectra facility for replac...

Страница 23: ...to the inlet flange using the three screws supplied Removing the Orifice Disk Insert the Removal Tool into the guide and push the tool into the orifice disk Press firmly until the tool bottoms against...

Страница 24: ...d be done with the Tool Guide removed as the disk needs to be offered as squarely as possible to the hole to avoid fouling Without disturbing the new Orifice Disk carefully re fit the tool guide to th...

Страница 25: ...pring fitted slide the Ceramic Coupling under the Retaining Ring paying attention to the couplings orientation which should be with the shouldered face uppermost Once the Ceramic Coupling is in place...

Страница 26: ...cement easier as there is no need to remove any vacuum flanges Disk part number 800010097 To replace the disk loosen the VCR fitting using a spanner the disk is fitted into a formed holder which is cl...

Страница 27: ...ronics if a replacement standard RGA control unit is fitted but the performance will be dramatically reduced This is of particularly relevance to customers who operate more than one MKS RGA Diaphragm...

Страница 28: ...suitably sized spanners One CF40 copper gasket 1 Shut down the Vision 2000 P system 2 Make a note of the orientation of the analyser with respect to the vacuum chamber This is most easily done by mak...

Страница 29: ...ned delays in providing this completed form will lead to delays in the servicing of the instrument Securely package all items to be returned using the original packaging where possible and send to the...

Страница 30: ...ase ensure that we have this information before we receive the equipment A copy should also be given to the carrier FAILURE TO COMPLETE THIS FORM OR COMPLY WITH THE PROCEDURE WILL LEAD TO DELAYS IN SE...

Страница 31: ...se substances Action to be taken in the event of human contact or spillage I hereby confirm that the only toxic or hazardous substances that the equipment specified above has been in contact with are...

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