MKS Instruments UK Ltd
V2000-P Hardware Manual
– SP102006.103 March 2013
11
Vacuum system installation
CAUTION
The vacuum system interface components are of high precision
and should only be fitted by competent personnel.
RGA vacuum chamber overview
The Vision 2000-P is supplied with the RGA vacuum chamber already assembled; the quadrupole analyser is
fitted into the chamber, the turbomolecular pump is also fitted as is the Electro pneumatic isolation valve. This
isolation valve we refer to as the process valve and is controlled by the RVC2.
The flange of the right-angled valve contains the orifice disk holder which provides a relatively high degree of
pressure reduction between the process chamber and the RGA sampling chamber along with the fixing for the
PVD ceramic source coupling.
Please refer to the shipment report for details of the inlet pressure reduction.
It is possible to change the orifice disk which may be desirable if at a future time the Vision 2000-P is moved to
another process tool or the process being monitored changes. Changing the orifice is detailed later in this
manual but it is important to consult your local MKS Spectra facility before making any changes.
Warning, exposed metal surfaces reach high temperatures during bake-out. Allow an adequate
cooling down period before handling
