MKS Instruments UK Ltd
V2000-P Hardware Manual
– SP102006.103 March 2013
12
Main chamber installation
This is a job that requires two people; one to support the Vision 2000-P system while the other fits the bolts to
the flange.
Fit the assembly to the process chamber using a clean CF35 copper gasket. The Vision 2000-P can be mounted
with the RGA sampling chamber horizontal, and the turbo pump hanging down vertically, or mounted with the
sampling chamber vertical. In this orientation, the foreline port of the turbo pump MUST be vertical and facing
down.
Tighten the six M6 nuts making sure that the gasket has not moved out of place.
Connecting the backing pump
Position the diaphragm pump close to the Vision 2000-P RGA vacuum chamber and connect the stainless steel
foreline to the turbo pump using a KF16 centring O-ring and clamp.
Connect the other end of the foreline to the diaphragm pump by using a KF16 centring O-ring and clamp.
Heater jacket
The Vision 2000-P is supplied with the heater jacket fitted. There is no need to remove the heater jacket during
the installation and testing procedure. The heater jacket enables the quadrupole chamber to be baked which
should be done before you start to acquire good data.
Microvision 2 installation
Rotate the locking ring on the RF/analyser connector so that the slot lines up with the keyway on the connector
tube. Hold the Microvision 2 unit so that the keyway lines up with the locating key on the analyser flange.
Gently slide the Microvision 2 unit on to the analyser. TAKE GREAT CARE the pins on the vacuum feedthrough
are easily damaged. DO NOT force the Microvision 2 unit on to the analyser.
When all of the pins are engaged, push the Microvision 2 firmly onto the analyser to ensure electrical continuity.
The last 3mm (1/8”) is important. When correctly fitted the front face of the RF/analyser connector should butt up
against the analyser flange.
Finally, pinch up the cap head bolt on the locking ring to secure the Microvision 2 in place.
