MKS Instruments UK Ltd
V2000-P Hardware Manual
– SP102006.103 March 2013
25
Re-assembling the Inlet Flange
Re-fit the springs to the Inlet Flange ensuring that they are not cross-threaded. Insert until the uppermost face of
the grub screw is flush with the face of the Inlet Flange.
Secure the Retaining Ring by using two of the three springs.
From the side without a spring fitted, slide the Ceramic Coupling under the Retaining Ring, paying attention to
the couplings orientation, which should be with the shouldered face uppermost.
Once the Ceramic Coupling is in place, check that the Retaining Ring is seated correctly around the shoulder of
the Ceramic Coupling.
Clean all handled parts with a suitable solvent and re-fit the Inlet Flange to the chamber using a new copper
gasket, by firstly sliding the bypass connection through the oven wall and then carefully locating the Ceramic
Coupling over the PVD ion-source of the quadrupole.
