MKS Instruments UK Ltd
V2000-P Hardware Manual
– SP102006.103 March 2013
16
Operation
Overview
This section gives an overview of the Vision 2000-P system operation.
The Microvision2 control unit receives power from the RVC2. The power switch on the RVC2 must be ON to
operate the system. When it is started, the Microvision2 senses the presence of the vacuum system controller
(RVC2) and interlocks its operation to it.
Process Eye Professional is started from the PC by an icon on the desktop. The vacuum system must be
started-up using this application program before the RGA filament can be turned on. However, to facilitate
bringing-up an installation quickly, the turbopump may be started and Bakeout initiated, directly from the RVC2
panel, without use of the computer software.
The operation of the vacuum system controller is fully described in the Remote Vacuum Controller manual.
The pumps are switched on from the Remote Vacuum Controller window or from the RVC2 and the sequence of
events is as follows:
The turbopump will start and begin to accelerate.
When the turbo reaches 95% of full speed, the RVC2 indicates Pump Up to Speed.
At this point the RGA filament may be switched on and the background spectra in the RGA chamber
may be observed.
Before a process sampling valve can be opened, the corresponding “VacOK” signal from the tool must be met.
A process valve can be opened either manually or automatically from the Process Eye Professional software
interface to the RVC2.
