MKS Instruments UK Ltd
V2000-P Hardware Manual
– SP102006.103 March 2013
8
Installation
The Vision 2000-P is a self contained RGA system for sampling directly from PVD process chambers. It consists
of four main parts:
The RGA vacuum chamber that bolts directly on to the process chamber.
The equipment sub-rack housing an RVC2 Vacuum Controller
The interconnecting cables.
The operating PC.
The RGA vacuum chamber contains the quadrupole residual gas analyser with a differentially pumped PVD
source, a high conductance isolating valve, a turbomolecular pump, and the sampling orifice interface with
optional pressure reduction. This assembly is surrounded by an electrical heating jacket. A bracket fitted to the
turbo pump acts as a securing point for the cable trunking.
The backing pump is a dry diaphragm pump and a stainless steel foreline connects it to the turbo pump.
A 19inch sub rack houses the Remote Vacuum Controller (RVC2) and cables running between the sub rack and
the RGA vacuum chamber are fitted into trunking to give additional protection.
CAUTION
There may be minor differences between one Vision 2000-P
system and another.
There are small differences between Vision 2000-P systems, these variations are usually due to the type of
process tool to which the Vision 2000-P is to be fitted, the type of process to be monitored and the pressure
regime from which the system will be sampling.
The design variations are purely to give the user the best possible system to meet the needs of the application.
This manual covers all variations of Vision 2000-P. The shipment report will detail your particular system and you
should refer to this when the manual gives details of options.
Initial checks
When you receive the equipment carefully check each item before removing the packaging to ensure that no
physical damage has occurred during shipment. Also check that all the boxes have been received by checking
against the packing slip.
If there has been obvious damage during shipment or if there are items listed on the packing slip as shipped
which have not arrived, immediately contact your local MKS Spectra facility or sales/service representative.
Carefully unpack the various parts of your Vision 2000-P system. Again, check for any signs of damage.
Find the shipment report and check for any missing items. Keep the shipment report safe, this is an important
document and you will need to refer to it later.
We suggest you keep the packaging material until the system is up and running as this seems to dramatically
reduce the chances of something needing to be returned!
Most insurance claims for shipment damage must be placed within 7 days from the date of delivery - in
WRITING. So, don’t delay Check It Out!
You are now ready to assembly the Vision 2000-P system.
