MKS Instruments UK Ltd
V2000-P Hardware Manual
– SP102006.103 March 2013
22
Replacing the orifice
– Type 1 Disk
Orifice removal and insertion must be carried out with the tool provided with your system
Remove the ceramic coupling retaining ring by easing the retaining springs
from their fitting points.
Remove the retaining ring and the ceramic PVD coupling.
The ceramic retaining ring is held in
place on the inlet flange by three
springs fixed to threaded grub
screws. The grub screws are then
screwed into the flange.
Unscrew and remove the three
screws from the flange.
Orifice Disk Tools
Orifice disk insertion and removal tools are supplied as part of the V2000P toolkit. Do not attempt to remove or
insert an orifice disk without using these tools. If they are missing from your toolkit, please contact your local
MKS Spectra facility for replacements.
Clean each tool before use using IPA.
Tool Guide
The “Tool Guide” is fixed to the inlet flange using the three screws supplied, replacing the ceramic coupling
assembly, and acts as the name suggests, as a guide for either the removal or insertion tools.
Removal Tool
The removal tool has a smaller diameter head than the insertion tool, this is to deform the orifice disk and allow
easy removal from the tapered hole into which the orifice disk is fitted.
Insertion Tool
The insertion tool has a head slightly less in diameter than the orifice disk itself, and is used to fit the orifice disk
into the tapered hole.
Removal
Insertion
Tool
Guide
