MKS Instruments UK Ltd
V2000-P Hardware Manual
– SP102006.103 March 2013
20
System shut down procedure
It is important to follow the procedure outlined below to shut down and switch off the Vision 2000-P system.
1.
Switch off the RGA filament and wait for 15 minutes for the filament to cool down.
2.
Switch off the turbo pump from the RVC2 Window within Process Eye Professional, or by pressing the
PUMPS switch on the RVC2.
3.
Switch off the RVC2.
4.
Allow the turbopump to come to a complete stop
