MKS Instruments UK Ltd
V2000-P Hardware Manual
– SP102006.103 March 2013
21
Maintenance
Generally, Vision 2000-P systems require very little maintenance with the frequency of routine maintenance
being dependant on the application. The operating pressure, amount and type of gases being pumped will have
an effect on the system.
In general, it is a good idea to schedule maintenance of the Vision 2000-P, including preventative measures,
such as renewing filaments, to coincide with planned maintenance of the process system.
Operating pressure
The Vision 2000-P system has a special PVD ion source. The optimum operating pressure of this source is 2x10
-
3
to 5x10
-3
mbar, but may be used at pressures up to 1x10
-2
mbar. As the ion source pressure increases above
the optimum, the peak heights become significantly non-linear - that is, they do not rise as much as the pressure.
Monitoring processes at pressures higher than 1x10
-2
mbar requires inlet pressure reduction.
In this system, pressure reduction is accomplished by incorporating a flow restricting orifice in the interface
coupling flange between the ion source and the inlet isolation valve. This extends the maximum process
monitoring pressure directly in proportion to the pressure reduction. Please refer to the shipment report for the
type of pressure reduction, if any, fitted to your system.
Accessing the orifice disk
The RGA chamber side of the right-
angle valve’s flange holds the ceramic socket which mates with the gas inlet
tube on the PVD ion source and the orifice disk. You may need to replace the orifice if it were to become blocked
or a different process is to be monitored. Please see your shipping information for the supplied orifice disk size.
1.
Shut down the Vision 2000-P system by following the System Shutdown Procedure instructions and
remove the heater jacket and the Microvision 2 from the RGA vacuum chamber.
2.
Remove the V2000P from your chamber.
3.
Remove the six M6 bolts holding the right-angle valve to the RGA sampling chamber and remove the right-
angle valve.
Refitting the inlet flange
To re-fit simply follow the removal procedure in reverse. Take care to ensure the ceramic socket mates correctly
with the gas inlet tube on the PVD source.
Once the Vision 2000-P system is re-assembled it must be leak checked before re-fitting the heater jacket.
