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902B Abs Piezo

Operation manual

Proprietary Information

This document contains confidential proprietary information belonging to MKS Instruments, Inc. This

information is not for publication and has been provided to MKS on the condition that it not be copied,

reproduced or disclosed, either wholly or in part, to third parties without the expressed written consent of

MKS Instruments, Inc.
The information contained in this document is subject to change without notice.

Copyright Information

is a registered trademark of

MKS Instruments, Inc., and mksinst™, DualTrans™, MicroPirani™, UniMag™, DualMag™, and

QuadMag™ are trademarks of MKS Instruments Inc. Windows

is a trademark of Microsoft

Corporation.

All other trademarks and registered trademarks are the properties of their respective

owners.
No part of this work may be reproduced by any method including photocopying and recording or by

any information or retrieval system without written permission of MKS Instruments, Inc.

Table of Contents

Warranty Information ......................................................................................................................................... 2

Proprietary Information ...................................................................................................................................... 3

Copyright Information ........................................................................................................................................ 3

Table of Contents .............................................................................................................................................. 3

Safety Information .............................................................................................................................................. 4

Symbols used: ................................................................................................................................................... 4

Unpacking .......................................................................................................................................................... 5

Description ......................................................................................................................................................... 6

902B Functions .................................................................................................................................................. 7

User Switch ........................................................................................................................................................ 7

LED Status Indicator .......................................................................................................................................... 7

Transducer installation (mechanical) ................................................................................................................. 8

Transducer installation (electrical) ..................................................................................................................... 9

Serial user interface ......................................................................................................................................... 11

Communication Protocol.................................................................................................................................. 12

Setpoint relays ................................................................................................................................................. 14

Integrated Touch Display ................................................................................................................................. 16

Pressure output ............................................................................................................................................... 18

Calibration and adjustment .............................................................................................................................. 19

Factory default ................................................................................................................................................. 20

Transducer lock function.................................................................................................................................. 21

User Switch Command .................................................................................................................................... 21

Transducer test ................................................................................................................................................ 21

Status Query Commands ................................................................................................................................ 22

Analog output ................................................................................................................................................... 23

Query Command list ........................................................................................................................................ 46

Setup and configuration command list ............................................................................................................ 47

Firmware upgrades (RS232 only) .................................................................................................................... 48

FAQ (Frequently Asked Questions .................................................................................................................. 49

Troubleshooting ............................................................................................................................................... 51

Specifications ................................................................................................................................................... 52

Accessories and replacement part numbers ................................................................................................... 55

Index ................................................................................................................................................................ 57

Содержание 902B

Страница 1: ...ion manual 1 902B Absolute Piezo Vacuum Pressure Transducer RS232 RS485 Display Operation and Installation Manual 902B Absolute Piezo Transducer Operation and Installation Manual MKS p n 100017633 Rev...

Страница 2: ...rmal operation e If the product has been dropped or the enclosure has been damaged f When the product exhibits a distinct change in performance This indicates a need for service Service and Warranty S...

Страница 3: ...ies of their respective owners No part of this work may be reproduced by any method including photocopying and recording or by any information or retrieval system without written permission of MKS Ins...

Страница 4: ...rder to perform according to the specifications Output pins are not protected against wrong electrical connections Wrong electrical connections can cause permanent damage to the transducer or interfer...

Страница 5: ...as 5 digits that identify flange communication interface analog output type I O connector and sensor sealing type Transducers can be delivered with customer configuration of various parameters like se...

Страница 6: ...mechanical deflection of a stainless steel 316 membrane relative to an integrated reference vacuum The Piezo measures true absolute pressure independent of gas composition and concentration The senso...

Страница 7: ...justment can be recovered using the FD ZER or FD SPN command See Factory default page 20 If the transducer is delivered with customer specified parameters the User Switch is disabled For enabling the...

Страница 8: ...t measuring performance avoid large temperature gradients and direct cooling like air condition air stream or direct heating like a pump exhaust stream Bake out The transducer electronics can withstan...

Страница 9: ...ace it Damage may occur to th e circuitry if excessive voltage is applied polarity reversed or if a wrong connection is made If using the analog voltage output connect the positive analog out and nega...

Страница 10: ...elay 3 Normally Open 925 I O Connector 9 pin 9 pin male DSUB PIN Description 1 Relay Normally Open 2 Relay Normally Closed 3 Power 9 30 VDC 4 Power return 5 Analog Output 6 Relay Common 7 RS485 RS232...

Страница 11: ...onment cable quality and communication speed but relative long cable spans up to 1 200m 4 000 ft is possible There are 2 wires other than ground that are used to transmit the digital RS485 signal The...

Страница 12: ...the value the user enters into the command syntax Each query or command must begin with the attention character and end with the termination FF Command syntax for an information query device address...

Страница 13: ...work and all transducers will transmit a reply Commands sent with address 255 will be executed by all transducers on the network but the transducers will not transmit replies For example use address 2...

Страница 14: ...cts requires de energizing spike protection Inadequate protection can cause permanent damage to the transducer or interfere with the analog output signal Always ensure that inductive in rush currents...

Страница 15: ...nd 253SH1 40 FF Reply 253ACK40 FF 4 Enable set point OFF ON Command 253EN1 ON FF Reply 253ACKON FF Setpoint setup by PDR900 Controller 1 Edit Setpoint Setpoint Value 1 Enter set point value 50 Torr 2...

Страница 16: ...etpoint safety delay Command 253SPD ON FF Command values ON OFF Command reply 253ACKON FF Query 253SPD FF Query reply 253ACKON FF Factory default ON Integrated Touch Display For 902B transducer versio...

Страница 17: ...ccessed via the Setpoint menu pressing the screen will lead back to the same menu If accessed via the quick access buttons on the Main screen pressing the screen will lead back to the Main screen Mode...

Страница 18: ...or reading PR2 Absolute Piezo sensor reading PR3 Absolute Piezo sensor reading PR4 Absolute Piezo sensor reading scientific notation The analog output is per default based on the absolute Piezo readin...

Страница 19: ...1 Torr Command 253ZER FF Command values None Command reply 253ACKZER FF Query 253ZER FF Query reply 253ACK0 FF Reset to default 253FD ZER FF Factory default Factory adjustment value Sensor value too h...

Страница 20: ...ble EN1 OFF Setpoint safety delay SPD ON Switch enable SW ON Analog out 1 AO1 235 1 Analog out 2 AO2 10 1 If the transducer is delivered with other analog output than standard mks part number specifie...

Страница 21: ...cer locked If the transducer is delivered with special configuration the lock function will only be temporarily disabled and will be enabled again after cycling power cycle or executing the enable loc...

Страница 22: ...KMKS FF Model MD Specifies transducer model number Query 253MD FF Query reply 253ACK902B FF Part Number PN Specifies transducer part number Query 253PN FF Query reply 253ACK902B 11030 FF Serial Number...

Страница 23: ...lange Interface Analog out Connector Relays Enclosure sealing 902B 1 1 0 2 0 0 0 10 V Linear 10 mV Torr mbar 1 0 5 V Linear 5 mV Torr mbar 2 2 10 V LOG10 3 1 5 V LOG5 4 1 V decade 5 0 10 V 100 mV Torr...

Страница 24: ...essure value assignment Second digit y 0 MKS Standard 1 VDC decade 1 Edwards APG L 1 99 10 VDC 2 Edwards APG100 3 Edwards WRG 4 Inficon PSG500 Oerlikon Leybold TTR91 5 Inficon MPG400 Pfeiffer PKR251 6...

Страница 25: ...MKS standard output This feature is a hardware option and must be specially ordered Refer to part number specifications page 3 The secondary analog output provides 12 bit resolution Command 253AO2 15...

Страница 26: ...0 6 65E 02 0 0250 6 00E 00 7 98E 00 7 98E 02 0 0300 7 00E 00 9 31E 00 9 31E 02 0 0350 8 00E 00 1 06E 01 1 06E 03 0 0400 9 00E 00 1 20E 01 1 20E 03 0 0450 1 00E 01 1 33E 01 1 33E 03 0 0500 2 00E 01 2 6...

Страница 27: ...00 6 65E 02 5 3979 6 00E 00 7 98E 00 7 98E 02 5 5563 7 00E 00 9 31E 00 9 31E 02 5 6902 8 00E 00 1 06E 01 1 06E 03 5 8062 9 00E 00 1 20E 01 1 20E 03 5 9085 1 00E 01 1 33E 01 1 33E 03 6 0000 2 00E 01 2...

Страница 28: ...0 6 65E 02 2 6990 6 00E 00 7 98E 00 7 98E 02 2 7782 7 00E 00 9 31E 00 9 31E 02 2 8451 8 00E 00 1 06E 01 1 06E 03 2 9031 9 00E 00 1 20E 01 1 20E 03 2 9542 1 00E 01 1 33E 01 1 33E 03 3 0000 2 00E 01 2 6...

Страница 29: ...1 5 301 20 7 301 3 0E 5 1 477 3 0E 3 3 477 3 0E 1 5 477 30 7 477 4 0E 5 1 602 4 0E 3 3 602 4 0E 1 5 602 40 7 602 5 0E 5 1 699 5 0E 3 3 699 5 0E 1 5 699 50 7 699 6 0E 5 1 778 6 0E 3 3 778 6 0E 1 5 778...

Страница 30: ...60 79 8 7 98E 03 6 70 93 1 9 31E 03 7 80 106 4 1 06E 04 8 90 119 7 1 20E 04 9 100 133 1 33E 04 10 1000 1330 1 33E 05 10 Analog output calibration 6 linear 1 9 8 VDC Provides a linear analog output in...

Страница 31: ...33E 02 1 33E 00 0 470 2 50E 02 3 33E 02 3 33E 00 0 563 5 00E 02 6 67E 02 6 67E 00 0 682 7 50E 02 1 00E 01 1 00E 01 0 780 1 00E 01 1 33E 01 1 33E 01 0 867 2 50E 01 3 33E 01 3 33E 01 1 255 5 00E 01 6 67...

Страница 32: ...4 7 60E 02 1 01E 03 1 01E 05 3 2396 8 00E 02 1 07E 03 1 07E 05 3 2398 Analog out calibration 9 MKS Moducell 325 amplified three times The Moducell x3 emulation is in curve form identical with the stan...

Страница 33: ...Torr Baratron emulation provides a signal directly proportional with pressure with a full scale reading of 10 VDC at 1 Torr Torr mbar Pascal Vout 1 00E 2 1 33E 2 1 33E0 0 100 5 00E 2 6 66E 2 6 66E0 0...

Страница 34: ...100 5 0 6 66 6 66E 2 0 500 10 0 13 3 1 333E 3 1 000 50 0 66 66 6 66E 3 5 000 100 0 133 3 1 333E 4 10 000 Analog output calibration 14 MKS Baratron 1000 Torr 902B Linear10 The 1000 Torr Baratron emulat...

Страница 35: ...1 4 52 2 00E 1 2 67E 1 2 67E 1 4 70 1 00E 1 1 33E 1 1 33E 1 5 00 1 00E 1 1 33E 1 1 33E 1 5 00 2 00E 1 2 67E 1 2 67E 1 5 30 3 00E 1 4 00E 1 4 00E 1 5 48 4 00E 1 5 33E 1 5 33E 1 5 60 5 00E 1 6 67E 1 6 6...

Страница 36: ...5 1 20E 3 7 1 10E 5 1 47E 5 1 47E 3 7 2 2 20E 5 2 93E 5 2 93E 3 8 3 20E 5 4 27E 5 4 27E 3 8 4 4 30E 5 5 73E 5 5 73E 3 8 6 5 90E 5 7 87E 5 7 87E 3 8 8 9 00E 5 1 20E 4 1 20E 2 9 1 40E 4 1 87E 4 1 87E 2...

Страница 37: ...9 00E 3 1 20E 2 1 20E 0 8 5000 P 10 Vout c Vout c log10 P c mbar 10 5 Torr 10 625 Pascal 8 5 Analog output calibration 19 Pfeiffer TPR265 Pfeiffer TPR280 Inficon TPR280 The Pfeiffer TPR265 emulation p...

Страница 38: ...8 00E 03 8 00E 01 2 84 0 008 1 07E 02 1 07E 00 3 06 0 01 1 33E 02 1 33E 00 3 27 0 02 2 67E 02 2 67E 00 4 16 0 04 5 33E 02 5 33E 00 5 56 0 05 6 67E 02 6 67E 00 6 01 0 06 8 00E 02 8 00E 00 6 46 0 08 1 0...

Страница 39: ...1 68E 01 1 000 1 69E 01 2 25E 01 2 25E 01 1 200 2 18E 01 2 90E 01 2 90E 01 1 400 2 74E 01 3 65E 01 3 65E 01 1 600 3 53E 01 4 71E 01 4 71E 01 1 846 0 4092 5 46E 01 5 46E 01 2 000 0 4879 6 51E 01 6 51E...

Страница 40: ...0 8 00E 02 8 00E 04 9 98 750 1 00E 03 1 00E 05 9 99 Analog output calibration 25 MKS GP275 Emulation 5 6 VDC FS The GP275 emulation with 5 6VDC full scale provides a strongly non linear output with ve...

Страница 41: ...4 8 4 44E 02 5 92E 02 5 92E 00 5 6 56E 02 8 74E 02 8 74E 00 5 2 9 53E 02 1 27E 01 1 27E 01 5 4 1 28E 01 1 71E 01 1 71E 01 5 6 1 67E 01 2 23E 01 2 23E 01 5 8 2 18E 01 2 90E 01 2 90E 01 6 2 68E 01 3 57...

Страница 42: ...45E 01 1 45E 01 4 8 1 32E 01 1 76E 01 1 76E 01 5 1 67E 01 2 22E 01 2 22E 01 5 2 2 37E 01 3 16E 01 3 16E 01 5 4 3 10E 01 4 13E 01 4 13E 01 5 6 4 05E 01 5 40E 01 5 40E 01 5 8 5 12E 01 6 82E 01 6 82E 01...

Страница 43: ...50E 01 1 00E 00 1 00E 02 2 442 1 50E 00 2 00E 00 2 00E 02 3 083 2 25E 00 3 00E 00 3 00E 02 3 452 3 00E 00 4 00E 00 4 00E 02 3 698 3 75E 00 5 00E 00 5 00E 02 3 875 4 50E 00 6 00E 00 6 00E 02 4 009 5 2...

Страница 44: ...0 1 00E 02 4 45 1 14E 00 1 51E 00 1 51E 02 5 1 72E 00 2 29E 00 2 29E 02 5 44 3 00E 00 4 00E 00 4 00E 02 6 12 4 50E 00 6 00E 00 6 00E 02 6 8 4 88E 00 6 50E 00 6 50E 02 7 4 5 25E 00 7 00E 00 7 00E 02 7...

Страница 45: ...00 1 1 50E 02 2 00E 02 2 00E 00 1 8 2 25E 02 3 00E 02 3 00E 00 2 5 3 00E 02 4 00E 02 4 00E 00 3 15 3 75E 02 5 00E 02 5 00E 00 3 65 4 50E 02 6 00E 02 6 00E 00 4 1 5 25E 02 7 00E 02 7 00E 00 4 5 6 00E...

Страница 46: ...setpoint value If set to below relay will be energized below setpoint value xxxSPD FF xxxACKON FF Setpoint safety delay Transducer information Command Response Explanation xxxMD FF xxxACK902B FF Mode...

Страница 47: ...lanation xxxBR 19200 FF xxxACK19200 FF Set communication Baud rate 4800 9600 19200 38400 57600 115200 230400 xxxAD 123 FF xxxACK123 FF Set Transducer communication address 001 to 253 xxxRSD OFF FF xxx...

Страница 48: ...ries firmware download software from the Documentation CD or download from www mksinst com vtsw 2 Turn power off 3 Hold down the User switch while turning power on 4 Release the User switch 5 Run the...

Страница 49: ...sure changes and there are no limits on the number of pressure cycles The setpoint relay contact endurance is minimum 2 000 000 cycles at 0 2 A 30 VDC load Analog output Q What is the update rate of t...

Страница 50: ...ice and repair Q 24 VDC supply voltage has been connected to analog output Is the transducer damaged A Likely the analog output is not protected against applying power to the output pin Q Reverse volt...

Страница 51: ...epair required Corroded sensor Transducer repair required Incorrect pressure value at low pressure Corroded sensor Transducer repair required Incorrect Vac adjustment has been executed Transducer expo...

Страница 52: ...stance 100 m max Setpoint relay contact endurance 1 A 30 VDC load 100 000 min Setpoint relay contact endurance 0 2 A 30 VDC load 2 000 000 min Setpoint relay response time 100 ms Materials exposed to...

Страница 53: ...902B Abs Piezo Operation manual 53 Dimensions KF16 flange P N 902B 1xxx mm Inch Dimensions VCR4 flange P N 902B 4xxx mm Inch...

Страница 54: ...902B Abs Piezo Operation manual 54 Dimensions VCR8 flange P N 902B 5xxx mm Inch...

Страница 55: ...2 For transducer part number 902B x2x2x 902B x2x3x 902B x2x5x Part number Description Interface 100013671 3 m 10ft RS485 100013672 5 m 16ft RS485 100013673 7 6m 25ft RS485 100013674 10 m 33ft RS485 PD...

Страница 56: ...ssure measurements Clear backlight display Easy viewing in all environments Readout of transducer parameters 902B Absolute Piezo transducer with IP54 enclosure Sealed enclosure for harsh environments...

Страница 57: ...n 20 Inductive relay load 12 Input Output Wiring 8 Internal volume 50 lock function 19 Manufacturer 20 Model 20 Moducell 325 30 NAK Code 10 NAK180 13 19 49 Operating temperature 50 Part number 3 Part...

Страница 58: ...902B Absolute Piezo Vacuum Pressure Transducer RS232 RS485 Display Operation and Installation Manual p n 100017633 902B Absolute Piezo Operation and Installation Manual Rev D February 2020...

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