902B Abs Piezo
Operation manual
6
Description
The 902B Absolute Piezo vacuum transducer offers a wide measuring range from 0.1 to 1000 Torr and is
based on measurement of thermal conductivity and measurement of mechanical deflection of a silicon
membrane.
The 902B can be used in a variety of applications as a
standalone unit or with the PDR900 display and
controller unit.
The transducer has RS232 or RS485 digital
communication interface for setup of transducer
parameters and to provide real time pressure
measurement.
The 902B has up to three mechanical relays which can be used for process
control such as interlocking valves or pumps. The analog voltage output can
be interfaced to external analog equipment for pressure readout or control.
Sensor technology
The 902B transducer contains one sensor element. The Piezo sensor is
based on measurement of the mechanical deflection of a stainless steel 316
membrane relative to an integrated reference vacuum. The Piezo measures
true absolute pressure independent of gas composition and concentration.
The sensor element is very robust and can withstand high G-forces and
instant air inrush.
Applications
The 902B can be used in many different vacuum applications within the
semiconductor, analytical and coating industries:
•
General vacuum pressure measurement
•
Vacuum pressure measurement in dirty and corrosive environment
•
Fore line and roughing pressure measurement
•
Gas backfilling measurement and controlling
•
System process control
•
Sense abnormal pressure and take appropriate security measure using set point relays
•
Control system pressure
Disposal (European Union only)
The 902B transducer is manufactured according to the RoHS directive.
For the benefit of the environment, at the end of life of the 902B, it should not
be disposed in the normal unsorted waste stream. It should be deposited at an
appropriate collection point or facility to enable recovery or recycling.
