MKS 902B, Руководство по эксплуатации и установке

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902B Abs Piezo Operation manual 27
Analog Output calibration = 2 (Log10)
P (Torr) = 10 Vout/2-2
V
out
= 2*(log(P (Torr))+2)
Torr mbar Pascal V
out
Power Off 0.0000
1.00E-01 1.33E-01 1.33E+01 2.0000
2.00E-01 2.66E-01 2.66E+01 2.6021
3.00E-01 3.99E-01 3.99E+01 2.9542
4.00E-01 5.32E-01 5.32E+01 3.2041
5.00E-01 6.65E-01 6.65E+01 3.3979
6.00E-01 7.98E-01 7.98E+01 3.5563
7.00E-01 9.31E-01 9.31E+01 3.6902
8.00E-01 1.06E+00 1.06E+02 3.8062
9.00E-01 1.20E+00 1.20E+02 3.9085
1.00E+00 1.33E+00 1.33E+02 4.0000
2.00E+00 2.66E+00 2.66E+02 4.6021
3.00E+00 3.99E+00 3.99E+02 4.9542
4.00E+00 5.32E+00 5.32E+02 5.2041
5.00E+00 6.65E+00 6.65E+02 5.3979
6.00E+00 7.98E+00 7.98E+02 5.5563
7.00E+00 9.31E+00 9.31E+02 5.6902
8.00E+00 1.06E+01 1.06E+03 5.8062
9.00E+00 1.20E+01 1.20E+03 5.9085
1.00E+01 1.33E+01 1.33E+03 6.0000
2.00E+01 2.66E+01 2.66E+03 6.6021
3.00E+01 3.99E+01 3.99E+03 6.9542
4.00E+01 5.32E+01 5.32E+03 7.2041
5.00E+01 6.65E+01 6.65E+03 7.3979
6.00E+01 7.98E+01 7.98E+03 7.5563
7.00E+01 9.31E+01 9.31E+03 7.6902
8.00E+01 1.06E+02 1.06E+04 7.8062
9.00E+01 1.20E+02 1.20E+04 7.9085
1.00E+02 1.33E+02 1.33E+04 8.0000
2.00E+02 2.66E+02 2.66E+04 8.6021
3.00E+02 3.99E+02 3.99E+04 8.9542
4.00E+02 5.32E+02 5.32E+04 9.2041
5.00E+02 6.65E+02 6.65E+04 9.3979
6.00E+02 7.98E+02 7.98E+04 9.5563
7.00E+02 9.31E+02 9.31E+04 9.6902
8.00E+02 1.06E+03 1.06E+05 9.8062
9.00E+02 1.20E+03 1.20E+05 9.9085
1.00E+03 1.33E+03 1.33E+05 10.0000