MKS 902B, Руководство по эксплуатации и установке

Страница: 41 / 58

902B Abs Piezo Operation manual 41
Analog output calibration = 26 (Edwards APG100-LC)
The APG100-L emulation provides a strongly nonlinear output with limited resolution in the low range and
close to atmospheric pressure.
Torr mbar Pascal V
out
7.50E-06 1.00E-05 1.00E-03 2
1.70E-04 2.27E-04 2.27E-02 2.1
3.75E-04 5.00E-04 5.00E-02 2.2
8.10E-04 1.08E-03 1.08E-01 2.4
1.26E-03 1.68E-03 1.68E-01 2.6
1.95E-03 2.60E-03 2.60E-01 2.8
2.88E-03 3.84E-03 3.84E-01 3
3.86E-03 5.15E-03 5.15E-01 3.2
5.15E-03 6.87E-03 6.87E-01 3.4
7.88E-03 1.05E-02 1.05E+00 3.6
1.17E-02 1.56E-02 1.56E+00 3.8
1.58E-02 2.10E-02 2.10E+00 4
2.08E-02 2.77E-02 2.77E+00 4.2
2.59E-02 3.45E-02 3.45E+00 4.4
3.12E-02 4.16E-02 4.16E+00 4.6
3.78E-02 5.04E-02 5.04E+00 4.8
4.44E-02 5.92E-02 5.92E+00 5
6.56E-02 8.74E-02 8.74E+00 5.2
9.53E-02 1.27E-01 1.27E+01 5.4
1.28E-01 1.71E-01 1.71E+01 5.6
1.67E-01 2.23E-01 2.23E+01 5.8
2.18E-01 2.90E-01 2.90E+01 6
2.68E-01 3.57E-01 3.57E+01 6.2
3.26E-01 4.35E-01 4.35E+01 6.4
4.00E-01 5.33E-01 5.33E+01 6.6
4.80E-01 6.40E-01 6.40E+01 6.8
5.75E-01 7.67E-01 7.67E+01 7
6.92E-01 9.23E-01 9.23E+01 7.2
8.55E-01 1.14E+00 1.14E+02 7.4
1.05E+00 1.40E+00 1.40E+02 7.6
1.25E+00 1.66E+00 1.66E+02 7.8
1.44E+00 1.92E+00 1.92E+02 8
1.79E+00 2.38E+00 2.38E+02 8.2
2.21E+00 2.95E+00 2.95E+02 8.4
2.63E+00 3.51E+00 3.51E+02 8.6
3.13E+00 4.17E+00 4.17E+02 8.8
4.05E+00 5.40E+00 5.40E+02 9
5.30E+00 7.06E+00 7.06E+02 9.2
7.27E+00 9.69E+00 9.69E+02 9.4
9.68E+00 1.29E+01 1.29E+03 9.5
1.25E+01 1.66E+01 1.66E+03 9.6
1.55E+01 2.07E+01 2.07E+03 9.7
2.54E+01 3.39E+01 3.39E+03 9.8
4.74E+01 6.32E+01 6.32E+03 9.9
1.08E+02 1.44E+02 1.44E+04 9.95
7.60E+02 1.00E+03 1.00E+05 10