MKS 902B, Руководство по эксплуатации и установке

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902B Abs Piezo Operation manual 40
Analog output calibration = 24 (Thyracont MT241.1-5)
The MT241 emulation provides a strongly non
l
inear output with limited resolution in the low range and close
to atmospheric pressure.
Torr mbar Pascal V
out
7.50E-4 1.00E-03 1.00E-01 0.41
3.00E-3 4.00E-03 4.00E-01 0.48
3.75E-3 5.00E-03 5.00E-01 0.5
6.00E-3 8.00E-03 8.00E-01 0.55
7.50E-3 1.00E-02 1.00E+00 0.61
1.50E-2 2.00E-02 2.00E+00 0.79
3.00E-2 4.00E-02 4.00E+00 1.1
4.50E-2 6.00E-02 6.00E+00 1.37
6.00E-2 8.00E-02 8.00E+00 1.6
7.50E-2 1.00E-01 1.00E+01 1.83
1.50E-1 2.00E-01 2.00E+01 2.64
2.25E-1 3.00E-01 3.00E+01 3.2
3.00E-1 4.00E-01 4.00E+01 3.71
3.75E-1 5.00E-01 5.00E+01 4
4.50E-1 6.00E-01 6.00E+01 4.45
6.00E-1 8.00E-01 8.00E+01 5
7.50E-1 1.00E+00 1.00E+02 5.44
3 4.00E+00 4.00E+02 7.96
5 6.00E+00 6.00E+02 8.5
8 1.00E+01 1.00E+03 9.01
15 2.00E+01 2.00E+03 9.45
30 4.00E+01 4.00E+03 9.7
45 6.00E+01 6.00E+03 9.78
75 1.00E+02 1.00E+04 9.85
150 2.00E+02 2.00E+04 9.92
300 4.00E+02 4.00E+04 9.95
450 6.00E+02 6.00E+04 9.96
600 8.00E+02 8.00E+04 9.98
750 1.00E+03 1.00E+05 9.99
Analog output calibration = 25 (MKS GP275 Emulation 5.6 VDC FS)
The GP275 emulation with 5.6VDC full scale provides a strongly non linear output with very poor resolution
in the low range and close to atmospheric pressure.
Torr mbar Pascal V
out
1.00E-04 1.33E-04 1.33E-02 0.375
2.00E-04 2.67E-04 2.67E-02 0.377
5.00E-04 6.67E-04 6.67E-02 0.379
1.00E-03 1.33E-03 1.33E-01 0.384
2.00E-03 2.67E-03 2.67E-01 0.392
5.00E-03 6.67E-03 6.67E-01 0.417
1.00E-02 1.33E-02 1.33E+00 0.455
2.00E-02 2.67E-02 2.67E+00 0.523
5.00E-02 6.67E-02 6.67E+00 0.682
1.00E-01 1.33E-01 1.33E+01 0.878
2.00E-01 2.67E-01 2.67E+01 1.155
5.00E-01 6.67E-01 6.67E+01 1.683
1.00E+00 1.33E+00 1.33E+02 2.217
2.00E+00 2.67E+00 2.67E+02 2.842
5.00E+00 6.67E+00 6.67E+02 3.675
1.00E+01 1.33E+01 1.33E+03 4.206
2.00E+01 2.67E+01 2.67E+03 4.577
5.00E+01 6.67E+01 6.67E+03 4.846
1.00E+02 1.33E+02 1.33E+04 4.945
2.00E+02 2.67E+02 2.67E+04 5.019
3.00E+02 4.00E+02 4.00E+04 5.111
4.00E+02 5.33E+02 5.33E+04 5.224
5.00E+02 6.67E+02 6.67E+04 5.329
6.00E+02 8.00E+02 8.00E+04 5.419
7.00E+02 9.33E+02 9.33E+04 5.495
7.60E+02 1.01E+03 1.01E+05 5.534
8.00E+02 1.07E+03 1.07E+05 5.558
9.00E+02 1.20E+03 1.20E+05 5.614