902B Abs Piezo
Operation manual
24
Analog output setup
The 902B can emulate analog voltage outputs from other vacuum transducers. The 902B analog output can
be assigned to the absolute Piezo sensor. The parameter digit represents the analog output calibration. The
primary analog output provides 16 bit resolution.
Due to curve form and limits, some of the alternative analog outputs will cause loss of
measuring range and accuracy. For best performance use the standard MKS analog
output. Change of analog output setup does not interfere on digital reading.
Change of analog output setup:
Command:
@253AO1!15;FF
Command values:
10 to 319 (xy)
First digit (x)
1 = PR1 (MicroPirani pressure value assignment)
2 = PR2 (Piezo pressure value assignment)
3 = PR3 (Combined pressure value assignment)
Second digit (y)
0 = MKS Standard (1 VDC/decade)
1 = Edwards APG-L (1.99 -10 VDC)
2 = Edwards APG100
3 = Edwards WRG
4 = Inficon PSG500 /Oerlikon/Leybold TTR91
5 = Inficon MPG400 / Pfeiffer PKR251
6 = Inficon BPG400 / MKS 999
7 = MKS GP275
8 = MKS Moducell 325
9 = MKS Moducell 325 (x3)
10 = MKS Baratron 0.1 Torr (0-10 VDC)
11 = MKS Baratron 1 Torr (0-10 VDC) / Hasting 2002OBE, Channel 2
12 = MKS Baratron 10 Torr (0-10 VDC)
13 = MKS Baratron 100 Torr (0-10 VDC)
14 = MKS Baratron 1000 Torr (0-10 VDC) / Linear10
15 = Piezo differential output
16 = Edwards AIM-S /-SL
17 = Edwards AIM-X / XL
18 = Pfeiffer IKR251
19 = Pfeiffer TPR 265
20 = OBE Channel 2 special
21 = Edwards DV6M
22 = Edwards APG-M
23 = MKS GP275 (0-9 VDC)
24 = MT 241.1
25 = MKS GP275 (0-5.6 VDC)
26 = Edwards APG100-LC
27 = Edwards APG100M
28 = MKS 907
29 = K6080-06
30 = Inficon PEG100
31 = Varian Eyesys
32 = Alcatel TA111
33 = MKS 685
34 = Linear5
35 = Log10
36 = Log5
Command reply:
@253ACK105;FF
Query:
@253AO1?;FF
Query reply:
@253ACK105;FF
Factory default:
35
