MKS 902B, Руководство по эксплуатации и установке

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902B Abs Piezo Operation manual 31
Analog output calibration = 7 (MKS GP275 emulation)
The GP275 emulation provides a strongly non-linear output with very poor resolution in the low range and
close to atmospheric pressure.
Torr mbar Pascal V
out
1.00E-05 1.33E-05 1.33E-03 0.372
1.00E-04 1.33E-04 1.33E-02 0.372
2.50E-04 3.33E-04 3.33E-02 0.376
5.00E-04 6.67E-04 6.67E-02 0.381
7.50E-04 1.00E-03 1.00E-01 0.385
1.00E-03 1.33E-03 1.33E-01 0.388
2.50E-03 3.33E-03 3.33E-01 0.406
5.00E-03 6.67E-03 6.67E-01 0.431
7.50E-03 1.00E-02 1.00E+00 0.452
1.00E-02 1.33E-02 1.33E+00 0.470
2.50E-02 3.33E-02 3.33E+00 0.563
5.00E-02 6.67E-02 6.67E+00 0.682
7.50E-02 1.00E-01 1.00E+01 0.780
1.00E-01 1.33E-01 1.33E+01 0.867
2.50E-01 3.33E-01 3.33E+01 1.255
5.00E-01 6.67E-01 6.67E+01 1.684
7.50E-01 1.00E+00 1.00E+02 1.990
1.00E+00 1.33E+00 1.33E+02 2.228
2.50E+00 3.33E+00 3.33E+02 3.053
5.00E+00 6.67E+00 6.67E+02 3.664
7.50E+00 1.00E+01 1.00E+03 3.986
1.00E+01 1.33E+01 1.33E+03 4.191
2.50E+01 3.33E+01 3.33E+03 4.706
5.00E+01 6.67E+01 6.67E+03 4.965
7.50E+01 1.00E+02 1.00E+04 5.075
1.00E+02 1.33E+02 1.33E+04 5.137
2.50E+02 3.33E+02 3.33E+04 5.274
5.00E+02 6.67E+02 6.67E+04 5.333
6.00E+02 8.00E+02 8.00E+04 5.345
7.00E+02 9.33E+02 9.33E+04 5.353
7.60E+02 1.01E+03 1.01E+05 5.357
8.00E+02 1.07E+03 1.07E+05 5.360