902B Abs Piezo
Operation manual
52
Specifications
Measuring range:
0.1 to 1000 Torr (absolute)
Accuracy
(1)
10-1000 Torr:
±1% of reading
Repeatability
(1)
±0.3% of full scale
Maximum pressure:
1500 Torr
Supply Voltage:
9-30 VDC
Power consumption:
<1.2 watt
Fuse (thermal recoverable):
200 mA
Analog output (MKS standard):
0-10 VDC
Analog output 1 resolution:
16 bit
Analog output 2 resolution:
12 bit
Analog output impedance:
100 Ω
Analog output update rate:
16 Hz
Setpoint relay range:
1-1000 Torr
Setpoint relay contact rating:
1A @ 30 VDC/VAC (resistive load)
Setpoint relay contact resistance:
100 mΩ (max)
Setpoint relay contact endurance (1 A @ 30 VDC load): 100,000 (min)
Setpoint relay contact endurance (0.2 A @ 30 VDC load): 2,000,000 (min)
Setpoint relay response time:
<100 ms
Materials exposed to vacuum:
Stainless Steel 316
Internal volume:
KF16 flange
1.023 cm
3
VCR4 flange
1.469 cm
3
VCR8 flange
2.627 cm
3
Electronics casing material:
Stainless steel 304
Flange material:
Stainless steel 316
Weight:
KF16 flange
170 g
VCR4 flange
191 g
VCR8 flange
221 g
Operating temperature:
0 to 40 °C (32 to 104 °F)
Bake out temperature (non-operating):
100 °C (212 °F)
Humidity:
0–95% Non-condensing
Ingress Protection Rating:
IP40
(2)
(1) Accuracy and repeatability are typical values measured in Nitrogen atmosphere after zero adjustment at ambient temperature.
(2) IP54 version available.
