902B Abs Piezo
Operation manual
46
Query Command list
Communication information
Command
Response
Explanation
@xxxBR?;FF
@xxxACK9600;FF
Communication baud rate (4800, 9600, 19200, 38400, 57600,
115200,230400)
@xxxAD?;FF
@xxxACK253;FF
Transducer communication address (001 to 253)
@xxxRSD?;FF
@xxxACKON;FF
Communication delay between receive and transmit sequence
Pressure reading
Command
Response
Explanation
@xxxPR1?;FF @xxxACK1.23;FF
Absolute Piezo sensor reading
@xxxPR2?;FF @xxxACK1.23;FF
Absolute Piezo sensor reading
@xxxPR3?;FF @xxxACK1.23;FF
Absolute Piezo sensor reading
@xxxPR4?;FF @xxxACK1.234E0;FF
Absolute Piezo sensor reading (three digits scientific notation)
Setpoint information
Command
Response
Explanation
@xxxSS1?;FF
@xxxSS2?;FF
@xxxSS3?;FF
@xxxACKSET;FF
Set point relay 1-3 status (SET=Relay energized / CLEAR=Relay
deenergized)
@xxxSP1?;FF
@xxxSP2?;FF
@xxxSP3?;FF
@xxxACK500;FF
Set point 1-3 switch value
@xxxSH1?;FF
@xxxSH2?;FF
@xxxSH3?;FF
@xxxACK505;FF
Set point 1-3 hystereses switch value
@xxxEN1?;FF
@xxxEN2?;FF
@xxxEN3?;FF
@xxxACKOFF;FF
Set point 1-3 enable status (OFF, ON)
@xxxSD1?;FF
@xxxSD2?;FF
@xxxSD3?;FF
@xxxACKBELOW;FF
Set point relay direction (ABOVE or BELOW)
If set to above relay will be energized above setpoint value. If set to
below relay will be energized below setpoint value
@xxxSPD?;FF
@xxxACKON;FF
Setpoint safety delay
Transducer information
Command
Response
Explanation
@xxxMD?;FF
@xxxACK902B;FF
Model number (902B)
@xxxDT?;FF
@xxxACKPiezo;FF
Device type name (Piezo)
@xxxMF?;FF
@xxxACKMKS;FF
Manufacturer name (MKS)
@xxxHV?;FF
@xxxACKA;FF
Hardware version
@xxxFV?;FF
@xxxACK1.00;FF
Firmware version
@xxxSN?;FF
@xxxACK08350123456;FF Serial number
@xxxSW?;FF
@xxxACKON;FF
Switch enable
@xxxTIM?;FF
@xxxACK12345;FF
Time on (hours of operation)
@xxxUT?;FF
@xxxACKVACUUM1;FF
User programmed text string
@xxxT?;FF
@xxxACKO;FF
Transducer status check
Calibration and adjustment information
Command
Response
Explanation
@xxxU?;FF
@xxxACKTORR;FF
Pressure unit setup (torr, mbar or pascal)
@xxxZER?;FF
@xxxACK1.88E+3;FF
Provides delta pressure value between current vacuum zero
adjustment and factory calibration
@xxxSPN?;FF
@xxxACK1.22E+1;FF
Provides delta pressure value between current atmospheric
adjustment and factory calibration
@xxxAO1?;FF
@xxxACK235;FF
Analog voltage output 1: Pressure assignment and calibration. (first
digit is pressure assignment, second and third digit is calibration)
@xxxAO2?;FF
@xxxACK10;FF
Analog voltage output 2: Pressure assignment and calibration. (first
digit is pressure assignment, second and third digit is calibration)
xxx
= Transducer communication address (001 to 253. Broadcast addresses: 254, 255)
