902B Abs Piezo
Operation manual
2
Notice
This product is intended for use by industrial customers and should be
serviced only by MKS trained representatives. The service manuals and
related materials are provided in English at no charge and are intended for
use by experienced technicians. It is the responsibility of the user to obtain
and assure the accuracy of any needed translations of manuals. If you
require assistance, contact the MKS Customer Service group. The MKS
Technical Support Group notifies users of record if safety-related upgrades
or new hazards associated with the product are identified.
Damage Requiring Service
Disconnect the product from all power sources and refer servicing to Qualified Service Personnel under the
following conditions:
a. When any cable or plug is damaged.
b. If any liquid has been spilled onto, or objects have fallen into the product.
c. If the product has been exposed to rain or water.
d. If the product does not operate normally even if you follow the operating instructions. Adjust only
those controls that are covered by the operation instructions. Improper adjustment of other controls
may result in damage and will often require extensive work by a qualified technician to restore the
product to its normal operation.
e. If the product has been dropped or the enclosure has been damaged.
f. When the product exhibits a distinct change in performance. This indicates a need for service.
Service and Warranty
Some minor problems are readily corrected on site. If the product requires service, contact the MKS
Technical Support Department at +1-833-986-1686. If the product must be returned to the factory for service,
request a Return Material Authorization (RMA) from MKS. Do not return products without first obtaining an
RMA. In some cases, a hazardous materials disclosure form may be required. The MKS Customer Service
Representative will advise you if the hazardous materials document is required.
When returning products to MKS, be sure to package the products to prevent shipping damage. Shipping
damage on returned products due to inadequate packaging is the Buyer's responsibility.
Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: +1-833-986-1686
Email: [email protected]
Visit our website at: www.mksinst.com
Warranty Information
MKS Instruments, Inc. provides an eighteen (18) month warranty from the date of shipment for new MKS
products. The MKS Instruments, Inc. general terms and conditions of sale provide the complete and
exclusive warranty for MKS products. This document is located on our web site at
, or may
be obtained by a contacting an MKS customer service representative.
