MKS MultiGas High-Speed Gas Sampling Cart
Safety
Procedures
and
Precautions
The following general safety precautions must be observed during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of intended use of the instrument and may impair the protection
provided by the equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to
comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument. Please
contact MKS for service and repair to ensure that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not attempt component replacement and internal adjustments. Any service
must be made by qualified service personnel only.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturer’s directions.
OPERATE AT SAFE INLET PRESSURES
Never operate at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants to enter the unit before or during use. Contamination such as dust, dirt,
lint, glass chips, and metal chips may permanently damage the unit or contaminate the process.
ALLOW THE UNIT TO WARM UP
Sample should not be applied before the unit has completely warmed up. Use a positive shutoff
valve to ensure that no erroneous flow can occur during warm up.
Installation and Use Manual 2011 APRIL 2 Rev. 1.5
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