MKS MultiGas High-Speed Gas Sampling Cart
Operating
Principle
The MultiGas Sampling Cart system is a stand-alone system designed to provide properly
conditioned sample to an MKS MultiGas Analyzer. The flow path is as follows:
1.
Sample inlet gas to be analyzed flows through a heated inlet line into the “heated box” at the
top of the system.
2.
The sample gas flows through a particulate filter and then through two pumps in the heated
box.
3.
The heated sample gas flows into the MKS MultiGas Analyzer for analysis.
Backpressure regulators allow adjustment of proper gas flows through the system.
Nitrogen and span gas inlets and flow paths with regulators, rotometers, and manual flow selector
valves are provided to provided span (calibration) and purge flows as required. A low flow of
nitrogen is maintained at all times through the MultiGas Analyzer to protect the system optics.
A simplified gas flow schematic is provided below. Please refer to the system plumbing and
instrumentation drawing (P&ID) for complete details.
N2
Span Gas
Heated Inlet Line
Gas Sample
MKS MulGas
Analyzer
Heated Box
FM2 Rotameter
FM1 Rotameter
To TOXIC VENT
Backpressure Regulator
PRVN2
Pressure
Regulator
Pressure
Regulator
PRVSG
MV2
Manual
Gas Selector Valve
MV1 Manual
Gas Selector
Valve
Filter FSAM-1
Pumps
Baffle Tank
Relief Valve Connecon
Simplified Gas Flow Schematic
Installation and Use Manual 2011 APRIL 2 Rev. 1.5
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