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MKS MultiGas High-Speed Gas Sampling Cart
Replacing
Pump
Diaphragms
and
Valve
Plates
Pump diaphragm and valve plates should be replaced when a pump output decreases. Consult MKS
for guidance.
Required Tools and Materials
Tools/Material
Quantity
Fork wrench or socket wrench 27 mm
1
Allen wrench, 3 mm
1
Allen wrench, 6 mm with torque indicator
1
Fork wrench 19 mm
1
Face spanner, pin diameter 5 mm*
1
Phillips screwdriver (only for .11 or .26-versions)
1
Heat resistant thread adhesive (for example, DELO ML 5327)
1
Felt-tip pen
1
Required Parts
Part
Dwg.
ID
Part
Quantity
per
Pump
Part
Number
8
Diaphragm
1
4
Valve Plate
2
5
O-ring
2
Installation and Use Manual 2011 APRIL 2 Rev. 1.5
40