MKS MultiGas High-Speed Gas Sampling Cart
Operation
System
Operation
Summary
After the initial installation, the sampling/analysis process is as follows:
1.
Connect sample line and sample line’s heater leads and thermocouple to cart.
2.
Power up cart and stabilize temperature at 191°C ±5°C. (Approximately 5 hours is required
for initial startup stabilization.)
3.
Turn the MV1 valve to the sample position.
4.
Turn on system pumps.
5.
Adjust back pressure regulator to reach desired flow measured at the FM1 rotometer
Refer to the following instructions for operational details, to ensure proper sequence and flow
settings for all gases.
Installation and Use Manual 2011 APRIL 2 Rev. 1.5
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