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1 About these instructions

This document applies to the software version stated on the title page.

Product names may occur in the document, which are added for identification

purposes only and belong to the respective owner of the rights.

1.1 Target groups

This instruction manual is aimed at the operator of the device, at technically qualified

specialists, and trained personnel.

1.2 Other associated documents

Operating instructions CHLD-Sensor:

Operation Manual CHLD Sensor QME

220

Operating Instructions Turbo Molecular

Pump:

Operating Instructions HiPace 300

Turbopump

Operating Instructions Backing Pump:

Operating Instructions GA01601_002_A1

Operating Instructions Compressor:

8200 Compressor Installation, Operation

and Service Instructions

Operating Instructions cryogenic pump:

Cryo-Torr Pump Installation, Operation

and Maintenance Instructions

Granville-Phillips-Sensor:

Instruction Manual

Spare parts CHLD700H accumulation

leak detector:

Spare Parts CHLD700H Accumulation

Leak Detector

1.3 Warnings

DANGER

Imminent hazard resulting in death or serious injuries

WARNING

Hazardous situation resulting in potential death or serious injuries

CAUTION

Hazardous situation resulting in minor injuries

Содержание Pernicka 700H CHLD

Страница 1: ...Translation of the original operating instructions Pernicka 700H CHLD Leak detector jin76aen1 04 1911 Catalog No 550 700 550 701 From software version 7 01 04 ...

Страница 2: ...INFICON GmbH Bonner Strasse 498 50968 Cologne Germany ...

Страница 3: ...mpressor 14 3 1 1 Unpack the device 15 3 1 2 Unpack the compressor 17 4 Description 18 4 1 Function 18 4 2 Operation modes 19 4 2 1 Operating mode Standby 19 4 2 2 Operating mode measurement 19 4 2 3 Operating mode regeneration 19 4 3 Construction 20 4 3 1 Device and compressor 20 4 3 2 Control unit 21 4 3 2 1 Display 22 4 3 3 Vacuum connections 23 4 3 3 1 Exhaust 23 4 3 3 2 Purge gas connection 2...

Страница 4: ...Switching the device on 41 6 2 Basic settings 42 6 2 1 Setting the measurement window 42 6 2 1 1 Set the Mini window 42 6 2 1 2 Setting the Measure window 44 6 2 2 Configuring the measurement process 47 6 3 Select method 49 6 3 1 Select an existing method 49 6 3 2 Create new method 50 6 3 3 Select existing recipe 52 6 3 4 Create new recipe 53 6 3 5 Set the setpoint for gross leak test 55 6 3 6 Sel...

Страница 5: ... 5 4 4 Display general information 68 6 5 4 5 Display events 69 6 6 Measurement data 70 6 7 Determine mass spectrometer 70 6 8 Perform regeneration 72 6 9 Switching off the device 73 7 Warning and error messages 74 7 1 Display warning and error messages 74 8 Cleaning and maintenance 78 8 1 General information 78 8 2 Device maintenance 78 8 2 1 Change O rings of the test chamber 78 8 3 Maintenance ...

Страница 6: ...n 88 9 1 1 Disconnect the device from the power supply 88 9 1 2 Separate the purge gas 89 9 1 3 Separate the compressed air 90 9 1 4 Disconnect the compressor 90 9 2 Sending in the device 92 9 3 Disposing of the device 94 10 Accessories and spare parts 95 10 1 Accessories 95 10 2 Spare parts 95 11 CE Declaration of Conformity 96 Index 97 ...

Страница 7: ...ration Manual CHLD Sensor QME 220 Operating Instructions Turbo Molecular Pump Operating Instructions HiPace 300 Turbopump Operating Instructions Backing Pump Operating Instructions GA01601_002_A1 Operating Instructions Compressor 8200 Compressor Installation Operation and Service Instructions Operating Instructions cryogenic pump Cryo Torr Pump Installation Operation and Maintenance Instructions G...

Страница 8: ...e operating modes Standby Measurement and Regeneration The device must be in the operating mode Standby before a measurement can begin If the measurement process is aborted the device is also in the operating mode Standby With the operating mode Measurement tracer gas which escapes from the test object is measured using a mass spectrometer CHLD Sensor The result is shown as a helium raw signal cur...

Страница 9: ... can be suppressed an internal background suppression can be activated with the factory settings Minimum detectable leak rate The minimum detectable leak rate which can be detected by the leak detector under ideal conditions 4 x 10 14 mbar l s Background signal Helium or hydrogen as part of water are natural components of air Before any leak detection an amount of the adjusted tracer gas is alread...

Страница 10: ...ective conductor cable at the electronics box Operating the device with a test chamber into which no grid has been inserted 2 2 Owner requirements The following notes are for companies or any person who is responsible for the safety and effective use of the product by the user employee or third party Safety conscious operation Operate the device only if it is in perfect technical condition and has...

Страница 11: ...ersonnel have read and understood the operating instructions and all other applicable documents 2 3 Duties of the operator Read observe and follow the information in this manual and in the work instructions provided by the owner This concerns in particular the safety and warning instructions Always observe the complete operating instructions for all work If you have any questions about operation o...

Страница 12: ...l power supply Mechanical energy hazards Jerky movements of the device during operation can lead to blockage of the turbo molecular pump There is a risk of injury due to the release of rotating energy or by parts moving around Do not jerk the unit during operation Hazards due to loss of stability If the transport rollers of the device are not locked there is a risk of injury due to loss of the sta...

Страница 13: ...m x 0 05 mm 1 PE bags 180 mm x 250 mm x 0 05 mm 1 Transport box for Pernicka 700H CHLD 1 Tilt sensor 4 Shock sensor 4 Double label 110 x 60 mm 1 Original instruction manual 1 Supplier documentation see Chapter Other applicable documents 1 Check the delivery contents after receiving the product to ensure it is complete Transport WARNING Falling loads The device does not have any crane eyelets The h...

Страница 14: ...y Note the red indicator on the delivery note and immediately check the delivery for transport damage If you notice any transport damage do not open the package Contact your transport company immediately Storage Store the device and the cryogenic pump compressor observing the technical data see Technical data 26 See also 2 Other associated documents 7 3 1 Unpacking the device and compressor The de...

Страница 15: ...l of the transport box 2 Remove the front panel from the transport box Carton with components Packing material Transport box Front plate 3 Remove the packing material from the transport box 4 Remove the carton from the transport box 5 Open the carton remove the packaging material and remove the components Cross beams Wedge with loop Transport strap Pernicka 700H CHLD ...

Страница 16: ...t box CAUTION Danger of crushing extremities Feet can be rolled over and crushed Keep feet away from the rollers 12 Remove the protective film from the device 13 Remove the foam sheet from the vacuum components and from the monitor Foam block under the test leak Foam block under the Adhesive tape on hand valve test leak CHLD Sensor 14 Remove the 2 foam blocks from under the CHLD Sensor and from un...

Страница 17: ...essor weighs approx 68 kg and can slip out of your hands Lift and transport the cryogenic pump compressor only with two people To lift get hold below the floor panel Carton with cryogenic pump compressor Cryogenic pump compressor Foam profile 1 Open the carton and remove the packaging material 2 Carefully lift the compressor out of the carton 3 Remove the foam profiles from the compressor 4 Move t...

Страница 18: ...urged with purge gas preferably with argon 5 0 After the completed purging process the purge gas is pumped out of the test chamber from the volume between the 2 sealing rings as well as from the valve block After checking the permissible pressure for the operation of the mass spectrometer CHLD Sensor the valve block is then evacuated Finally the CHLD Sensor is switched on The CHLD Sensor is switch...

Страница 19: ...by Before a measurement can be started the device must be in Standby operating mode The device is in Standby operating mode when the measurement process has been terminated normally after the fine leak test when the measurement process was terminated after the gross leak test after a completed regeneration when the device is switched on In the Standby operating mode the valves V1 V3 V4 V5 and V6 a...

Страница 20: ...asurement program Test chamber for test object Keyboard Storage Valve groups Connection for customer calibration leak optional Valve groups Mains switch Interfaces Device Device Cryogenic pump compressor Selector switch for mains supply Trackball USB Selector switch for main frequency Fig 3 Device top and cryogenic pump compressor bottom Front view ...

Страница 21: ...nic pump compressor Power supply Backing pump Compressed air connection Purge gas connection Protective conductor PE connection Compressor power supply Helium Helium Cryogenic pump motor power supply Manometer for helium operating pressure Cryogenic pump compressor Device Supply Return Line Line CHLD Sensor WATLOW CTI Fig 4 Device top and cryogenic pump compressor bottom Back view 4 3 2 Control un...

Страница 22: ...ry setting options for preparing carrying out and evaluating the measurement process are shown on the monitor Design and structure of window is shown as an example with the window Measure which appears after switching on the device Tab Measurement results numeric System diagram Message window Buttons Selection menu Measuring results graphic Fig 5 Design and structure of the window Tab To open a wi...

Страница 23: ...n the upper diagram are linearly scaled Line graph in the lower diagram are logarithmically scaled 4 3 3 Vacuum connections 4 3 3 1 Exhaust The device is equipped with an exhaust filter on the backing pump as standard The exhaust filter is located on the backing pump in the lower area of the device The evaporated gases are guided out of the device through the exhaust filter When using the device i...

Страница 24: ... Argon 5 0 via the hose connection The pressure of the gas line should not be more than 50 mBar overpressure 4 3 4 Connections for accessories and control signals Power cord for power supply cryogenic pump compressor Connection for power supply cryogenic pump compressor Purge gas connection Connection of the power cord for the device Connection of the protective conductor PE Compressed air connect...

Страница 25: ...d for the analog signals The upper window shows the raw data of the analog signals The lower window shows the analog signals with the selected filter 1 To influence the filtering select the corresponding values in the field AI Coefficients 2 Press the reset update button ð The result of the changed filter is shown directly in the lower window 4 3 5 Markings on the device The markings on the device...

Страница 26: ...0 V 50 60 Hz Order number 550 701 Nominal current 15 A Order number 550 700 10 A Order number 550 701 Protection class IP 20 Excess voltage category II Electronic interfaces USB Ethernet interface Compressor for cryogenic pump Nominal voltage 208 V 240 V 50 60 Hz Nominal current 10 A 4 3 6 3 Physical data Device Minimum detectable leak rate for helium 4 x 10 14 mbar l s Leak rate internal test lea...

Страница 27: ...ing pump Detectable masses 2 100 Connection of customer test leak DN 16 CF 4 3 6 4 Ambient conditions Device Permissible ambient temperature during operation 15 C 28 C Permissible storage temperature 10 C 45 C Max relative humidity up to 31 C 80 Max relative humidity from 31 C to 40 C linearly decreasing from 80 to 50 Max relative humidity above 40 C 50 Pollution degree II Max altitude above sea l...

Страница 28: ...tes for a successful measurement operation defined in the following list are met Check Present Not present Device footprint 1 m 2 Compressor footprint 0 5 m 2 Allowable ambient temperature for the device when operating 15 C 28 C Allowable ambient temperature for the compressor when operating 10 C 38 C Max relative humidity for the device up to 31 C 80 Device nominal power 2300 VA Device nominal vo...

Страница 29: ...rge gas supply from the pressure reducer to the device 6 35 mm copper or stainless steel pipe Helium background in the operating environment of the device 6 ppm Install the device the cryogenic pump compressor and all parts included in the scope of delivery See original operating instructions chapter Installation 28 5 2 Setup DANGER Health risk due to exhaust fumes and vapors Exhaust fumes and vap...

Страница 30: ...e the device can roll away uncontrollably Fix the device by latching the front rollers NOTICE Material damage from overheated device The device and above all the cryogenic pump compressor become warm during operation and can overheat without sufficient ventilation Please note the technical specifications Ensure sufficient ventilation especially on the ventilation slots on the left and right of the...

Страница 31: ...ressor to 208 V 60 Hz To correctly set the cryogenic pump compressor on the device with the order number 550 701 set the cryogenic pump compressor to 230 V 50 Hz NOTICE Damage to the cryogenic pump compressor due to unfavorable installation location Too small and not sufficiently ventilated location can damage the cryogenic pump compressor Choose as a location for the compressor a sufficiently ven...

Страница 32: ...re Power connection for the cryogenic pump motor Power cord for compressor power supply Connection helium Connection helium Return Line Supply Line Fig 8 Connections on the cryogenic pump compressor Helium Helium Power cord for the cryogenic pump motor Cryogenic pump motor Return Supply Line Line Fig 9 Connections on the device ...

Страница 33: ... cryogenic pump The power cord for the power supply of the cryogenic pump motor is mounted in the delivery state on the device Insert the round connector of the mains cable into the COLD HEAD POWER socket and turn the threaded housing hand tight Install the power cord for the compressor power supply The power cord for the power supply of the compressor is mounted in the delivery state on the devic...

Страница 34: ...ective conductor connection X Y Fig 10 Compressor Terminal points for the connection of the power cord 5 4 Connecting the compressed air Use a compressed air hose made of polypropylene with a diameter of 6 mm for the compressed air supply Compressed air quick coupling Compressed air hose Fig 11 Connecting the compressed air ...

Страница 35: ...onnecting the purge gas Use only Argon 5 0 or better as purge gas Use a metal line made of stainless steel or copper with a diameter of 6 35 mm for the purge gas supply The sealing elements ferrel and clamping ring remain on the metal line and do not have to be renewed as long as the same metal line is used If you are using a new metal line for the purge gas supply replace the ferrel and the clamp...

Страница 36: ... Incorrect mains voltage and incorrect mains frequency can lead to the destruction of the device and personal injury Check that the mains voltage and mains frequency permissible for the Pernicka 700H CHLD as well as the included cryogenic pump compressor comply with the mains voltage and mains frequency available at the place of use Protective conductor connection point Connection for power supply...

Страница 37: ...he power switch to OFF Disconnect the device from the power supply and secure the device against re activation 2 Switch off the backing pump 3 Hold the exhaust filter with one hand and loosen the wing nut of the clamping ring 4 Remove the exhaust filter from the backing pump 5 Use a suitable connection piece e g a 90 degree hose adapter with KF 16 on the pump side onto the backing pump 6 Tighten t...

Страница 38: ... Accessories required Test chamber small medium or large Required tools Allen key modified 9 64 inch included General purpose pliers of small or slip joint pliers Test chamber Screw connection purge gas supply Flange with screws Purge gas supply Fig 15 Test chamber built in state 1 If the inlet flange is covered by a dummy flange normal newly delivered condition you have to remove the 6 screws of ...

Страница 39: ... mount the new test chamber Flange Copper sealing ring Test chamber Connection for the purge gas supply Fig 16 Test chamber Install new test chamber 7 Tighten the 6 screws on the flange only slightly 8 Recommendation Using the Allen key tighten the 6 screws on the flange according to the 2 2 3 system For example Tighten screw 1 Tighten the screws in the order 3 5 2 Tighten the screws in the order ...

Страница 40: ...e reinforcing sleeves into the intermediate corrugated hose 2 The O ring on the reinforcing sleeve seals by screwing 10 To prevent the test object from being sucked out of the test chamber during the measurement process place the delivered grid in the test chamber Grid Test chamber lid open Flange 1 2 3 4 5 6 Fig 18 Test chamber with inserted grid left and flange with example numbering of the scre...

Страница 41: ...ompressor on the device with the order number 550 701 set the cryogenic pump compressor to 230 V 50 Hz Cryogenic pump compressor Read and follow the included documentation Cryo Torr Pump Installation Operation and Maintenance Instructions 1 Ensure that the correct mains voltage and the correct mains frequency are set on the compressor 2 To turn the unit on set the power switch to ON ð The device h...

Страница 42: ...ing the device in the Measurement operating mode you can choose between two windows 6 2 1 1 Set the Mini window To open the Mini window press the tab Mini Display of the leak rate Message window Display measuring progress Amplifier ON OFF Cathode in Method in use CHLD Sensor ON OFF SEM Fig 20 Window Mini The Mini window offers all the settings required for the measurement process and can be used f...

Страница 43: ...e to stop regeneration before the end of the set end time press this button Leak Test To start the measurement process to determine the leak rate press this button See Preparing the measurement 60 Display of the leak rate To display the measured leak rate in the units mbar l s or atm cc s in the vector diagram and as a numeric value The green measuring range defines the good test objects The red m...

Страница 44: ...n addition to the standard settings the Measure window offers additional options for configuring the measurement process At the same time the current status of the individual components of the device during the measurement are displayed in the system diagram This window is suitable for appropriately trained operators and for maintenance and service personnel as well as for measurements with a high...

Страница 45: ... To start the selected mode from the selection menu press this button Display of the accumulation signal To display the linear scaled measurement signal during the accumulation phase in amps A in the upper diagram The leak rate is determined from the slope of the signal waveforms shown in the diagram with units mbar l s or atm cc s To define the threshold value for the gross leak test select the m...

Страница 46: ...nuous analog sampling of the signal intensities across the measuring axis Method You can start the method editor See Select method 49 Recipe You can start the recipe editor to configure the mass spectrometer CHLD Sensor See Select method 49 Parameter Description He TL Slope The test leakage signal slope measured during the calibration in unit of measurement A s He Sample Slope The helium signal sl...

Страница 47: ...ation window press the tab Configuration Control Options Valve Control Helium calibration leak AI configuration User Form AutoStartUp Fig 22 Window Configuration AI configuration For assigning the sensor parameters for the corresponding sensors The curves for the Pirani sensors the cryogenic temperature the test leak temperature and the rotational speed of the turbo molecular pump are shown Contro...

Страница 48: ...uto Filament Activate the cathode in the CHLD Sensor automatically after evacuation To enable the cathode in the CHLD Sensor automatically after a completed evacuation activate this option Valve Control Valve Delay To set the valve delay time This delay time ensures that two valves do not change their state at the same time Set the value 3000 i e a time delay of 3 seconds between the respective st...

Страница 49: ...stem To turn on this feature click the icon The triangle in the symbol is displayed in green To turn off this feature click the icon The triangle in the symbol is displayed in black Use User Input Form Input window for detailed information on the test object To enter only the serial number for each test object deselect the Use User Input Form option To enter detailed information for each test obje...

Страница 50: ... pending measurements are carried out according to this method If you have selected a method a recipe is automatically assigned to this method You have the option of assigning a different recipe to your chosen method see Select existing recipe 52 or a new recipe see Create new recipe 53 6 3 2 Create new method Using a method you define the times and limits to be set over the measurement sequence o...

Страница 51: ...ble 7 Press the Use Method button ð The new method has been created and the upcoming measurement s will be carried out according to this method Button Description new To create a new method press this button delete To delete a method press this button Use Method To perform measurements according to an existing or newly created method press this button Cancel To end the method editor press this but...

Страница 52: ...chamber and the volume between the 2 sealing rings on the test chamber are purged with purge gas at the end of the measurement procedure Gross Leak threshold Setpoint for the upper limit for the gross leak test Below this setpoint the test objects to be measured do not have any gross leaks This value must be greater than any measured value of test objects without gross leaks See also Set the setpo...

Страница 53: ... existing recipe 2 Press the Open button Fig 26 3 Select the recipe from the list 4 To accept the selected recipe press the OK button ð The selected recipe has been accepted 6 3 4 Create new recipe With a recipe you define which masses gases with which measurement settings are used for measuring 1 Measure Recipe Load Run ...

Страница 54: ...ction function is not used Cycle Time Die Cycle Time results from the sum of the dwell Dwell times plus the changeover times Parameter Description Channel Number of the parameter set Chan Mode Number of the parameter sets 1 To create the parameter set for the gas to be measured and to use the parameter set in a method select enable 2 To create the parameter set for the gas to be measured without u...

Страница 55: ...nd the reference value 500 for the background mass 5 For leak rates less than 2 x 10 12 mbar l s these values must be correspondingly increased e g 5 s for a leakage rate of 2 x 10 13 mbar l s Shorter measuring times result in larger measured values Resolution How many measuring points per mass resolution Use the default setting 50 Amp Mode Operating mode of the amplifier Use the default setting A...

Страница 56: ... leak 3 To save the settings press the Use Method button ð The setpoint for the gross leak test is set Procedure for determining an appropriate setpoint 1 Carry out several measurements without a test object or with a known tight test object depending on the test chamber used and the purge gas Argon 5 0 typically values 1 x 10 8 A ð Following the measurements the value determined during the gross ...

Страница 57: ...nite or explode Knurled thumbscrew for flow control valve Fig 29 Flow control valve for Single or multi gas measuring 6 3 6 1 Select single gas 1 Mini Method Load Run or Measure Method Load Run 2 Select the method with the desired helium setting in the method editor See Select method 49 3 Press the Use Method button 4 Adjust the flow control valve When using the Single gas measurement use the thum...

Страница 58: ...bration only with the calibration leak mounted on the device Without calibration no measurement process can be started The Leak Test button in the Mini and Measure measurement windows is not active in this case but is shown in gray To carry out measurements perform a calibration Perform the calibration once a day or if there is any doubt about the measurement readiness of the device After a stands...

Страница 59: ...te the device with the internal calibration leak 1 Place the external calibration leak with the copper sealing ring on the flange 2 Tighten the 6 screws on the flange only slightly 3 Recommendation Using the modified Allen key 9 64 inch included in delivery tighten the 6 screws on the flange according to the 2 2 3 system For example Tighten screw 1 Tighten the screws in the order 3 5 2 Tighten the...

Страница 60: ...6 5 1 Preparing the measurement NOTICE Material damage due to improper filling of the test chamber If the test chamber is operated without a grid inserted test objects from the test chamber can be sucked into the device and cause damage to the device In order to carry out measurements place the grid that is supplied with the test chamber in the test chamber To remove dirt from the test chamber vac...

Страница 61: ... close the flow control valve s knurled screw see Select single gas 57 If you want to use several tracer gases open the flow control valve s knurled screw see Select multi gas 57 4 Use a suitable tool such as a plastic tweezer to place the test object in the test chamber and close the lid of the test chamber 5 Make sure that the correct basic settings and the settings for the current measurement a...

Страница 62: ...e results you can choose between two measurement windows To start and run the measurement with the Mini window see Select the Mini window and start the measurement 62 To start and run the measurement with the Measure window see Select the Measure window and start the measurement 63 6 5 3 1 Select the Mini window and start the measurement The Mini window provides all settings required for the measu...

Страница 63: ...easurement process At the same time the current status of the individual components of the device during the measurement are displayed in the system diagram This window is suitable for appropriately trained operators and for maintenance and service personnel as well as for measurements with a high configuration requirement 1 To open the Measure window press the tab Measure Fig 33 Window Measure 2 ...

Страница 64: ...s measurement process see Set the setpoint for gross leak test 55 If the helium signal falls below this setpoint the measurement process is terminated correctly and the measurement process is continued with the fine leak test see Carry out a fine leak test 65 If the helium signal exceeds this setpoint the measurement process is terminated and no fine leak test is performed See Complete the measure...

Страница 65: ...y out a fine leak test If during the gross leak test the result falls below the set setpoint the fine leak test is carried out automatically Fig 35 Display of the measurement results in the window Mini The measured leak rate is displayed in the Mini window in a vector diagram in the measurement unit mbar l s or atm cc s A colored good bad display enables the qualitative assignment of the measured ...

Страница 66: ... 3 6 Complete the measurement process according to the gross leak and fine leak test In the Configuration window you can define whether or not the Print Report window should be opened after the end of a measurement Fig 37 Window Print Report 1 To print the contents of the Print Report window press the Print button ð The contents of the Print Report window are printed 2 Remove the measured test obj...

Страница 67: ...ent 6 5 4 1 Display state time diagrams To open the Mixed Data window press the tab Mixed Data Fig 38 Window Mixed Data The Mixed Data window provides an overview of the timing of all signals during a measurement process 6 5 4 2 Display measurement parameters To open the MS Panel window press the tab MS Panel Fig 39 Window MS Panel ...

Страница 68: ...ment of the digital I O Status Ready Pin 17 Ready HIGH You can start a measurement calibration Pass Pin 18 Pass HIGH The tested test object is leak proof Fine Leak Pin 19 Gross Leak Pin 21 Fine Leak HIGH and Gross Leak LOW Helium fine leak Fine Leak LOW and Gross Leak HIGH Helium gross leak Fine Leak HIGH and Gross Leak HIGH Gas 2 fine leak Error Pin 20 Error HIGH Error message displayed on the sc...

Страница 69: ...ls The Locals window displays path and general information such as the serial number of the device and the software version 6 5 4 5 Display events To open the Events window press the tab Events Fig 42 Window Events In the Events window you will be shown which internal software routine is currently running ...

Страница 70: ... press this button In the Open Office you can store the measurement results at any location e g a USB flash drive FAT32 formatted In the Locals window the log xls is stored in which contains all measurement results regardless of the export 6 7 Determine mass spectrometer In the Scan mode you can use the CHLD Sensor to measure all the masses present in the system of the device and display them as a...

Страница 71: ...elect the scan procedure from the list press the Use Parameters button ð The measurement of all masses of the gases present in the system is performed according to this scanning procedure and the result is displayed as a mass spectrum in the Measure window Fig 45 Measure window with determined mass spectrum To stop the measurement press the red STOP button ...

Страница 72: ...me and Date Fig 46 Input window Regeneration cryogenic pump 2 To define the regeneration period choose between the 2 possibilities ð To start regeneration on a daily basis with set start time select weekday To set the start time with the Start Time parameter the end time with the End Time parameter press the Set Time and Date button To start the regeneration immediately press the Set Time to Now b...

Страница 73: ...ogenic pump and the device is switched off the gases are evaporated and the rupture disk on the cryogenic pump can rupture as a result of the rising pressure Perform a regeneration of the cryogenic pump at least up to a temperature of 280 K before you switch off the device You can turn the device off with the power switch on the back of the device The parameters set in the device remain saved 1 St...

Страница 74: ...interrupt operation when necessary Warnings Warnings warn of instrument modes that can impair the accuracy of measurements Operation of the instrument is not interrupted Error messages Errors are events that force the interruption of the operation The error message consists of a number and a descriptive text 7 1 Display warning and error messages To open the Errors window press the tab Errors Erro...

Страница 75: ... CHLD Sensor Please contact the INFICON service Error messages Message Possible causes Solution External protection triggered HV pressure is too high Check the tightness of the valves Emission Error HV pressure is too high Check the tightness of the valves Filament 1 defect Cathode 1 is defective Change to the cathode 2 in the Pernicka 700H measurement program See Select cathode in the CHLD Sensor...

Страница 76: ...lied power cord into the POWER LINE INPUT plug and connect the power cord to the power supply Red X in the system diagram Measure window at the point Air pressure The pressure of the compressed air supply is less than 6 9 bar Check that the air pressure is greater than 7 bar Open the pressure valves in the supply lines Gradually increase the pressure each by 0 5 bar The lid of the test chamber can...

Страница 77: ...INFICON Warning and error messages 7 Pernicka 700H CHLD Operating instructions jin76aen1 04 1911 77 100 Situation Possible causes Solution The sound comes from the activated pressure relief valve ...

Страница 78: ...be carried out by the customer These maintenance procedures are described in this Original Operating Instructions Pernicka 700H CHLD Service level II and II maintenance work on the Pernicka 700H CHLD may only be carried out by authorized INFICON service technicians or by persons authorized by INFICON GmbH Cologne These maintenance procedures are described in the Pernicka 700H CHLD Service Document...

Страница 79: ...int free cloth 4 Insert the two new O rings into the test chamber 5 Close the lid of the test chamber Test chamber O ring Fig 49 Test chamber Lid open 8 3 Maintenance of the CHLD sensor 8 3 1 Check the fan function Read and follow the included technical documentation Operation Manual CHLD Sensor QME 220 The fan is used to cool the internal electronic modules of the CHLD Sensor Required spare parts...

Страница 80: ...emperature in the QME 220 electronic unit is normally in the range of 20 C 25 C above the ambient temperature 1 To open the Tools window press the tab Tools 2 Tools Tune Up Display QME Temp Fig 50 CHLD Sensor Check temperature of the QME 220 electronic unit 3 The current temperature of the QME 220 electronics device of the CHLD Sensor is displayed in the QME Temp field Check 4 If the temperature i...

Страница 81: ...mat regularly Required spare parts Filter mats 5 pieces CHLD 700 Sensor electronics box Order number 452 552 Required tools Screwdriver Torx T10 Separate the connection from the IO 220 module Disconnect all electrical connections to the IO 220 module Power supply Ethernet cable analog I O cable digital I O cable Connection for the power supply Connection PC Module IO 220 QME 220 Analog I O Digital...

Страница 82: ...ble base that allows you to work comfortably on the front panel Screw Screw hidden Electronic device Analyzer QMA 220 QME 220 Fig 52 CHLD Sensor Unscrew the QME 220 electronics device Check or change the filter mat 1 To remove the IO 220 module loosen the 3 screws Screw Screw Screw Torx T10 Torx Torx T10 T10 Fig 53 CHLD Sensor Remove the IO 220 module ...

Страница 83: ...t and clean if necessary 7 To mount the filter holder cover on the back of the CHLD Sensor secure the filter holder cover with the screw 8 Mount the IO 220 module with the 3 screws Mount the QME 220 electronic device onto the QMA 220 analyzer 1 Loosen the two screws on the black plastic part of the QME 220 using an Allen key SW 4 so that the movable part has 2 3 mm clearance 2 Carefully insert the...

Страница 84: ...net cable analog I O cable digital I O cable 8 4 Maintenance of the internal calibration leak 8 4 1 Perform calibration Carry out the calibration of the device according to the maintenance plan see Maintenance plan 87 Perform calibration see Calibrating 58 Required spare parts None Required tools None 8 4 2 Recalibration of the calibration leak by VTI Carry out the maintenance work according to th...

Страница 85: ...ordance with the maintenance plan see Maintenance plan 87 and the manufacturer s technical documentation delivered with the device See Operating Instructions GA01601_002_A1 Required spare parts None Required tools None The oil level of the backing pump must always be within the minimum oil level and maximum oil level markings during operation Check that the oil level is approximately in the center...

Страница 86: ...bout Displays the software version number and INFICON address information Tune Up For example to switch between heating wires 1 and 2 in the CHLD Sensor press this button See Select cathode in the CHLD Sensor 87 soft emi Call diagnostic tools for the cathodes You can increase the emission current of the cathode degas To clean the cathodes of adherent substances select this function The emission cu...

Страница 87: ...field Filament choose between Filament 1 and Filament 2 3 To save the setting activate the option save IS voltage 8 7 Maintenance plan Regardless of the described maintenance cycles a replacement depends on contamination and wear 8 7 1 Maintenance table Maintenance cycle Personnel Additional information 4000 h Operating personnel 8 3 2 Check or change the filter mat 8000 h Operating personnel 8 2 ...

Страница 88: ...compressor according to the following chapters of the power supply and operating media 9 1 1 Disconnect the device from the power supply Protective conductor connection point Connection for power supply cryogenic pump compressor Connection for the device power supply Fig 59 Disconnect the device from the power supply 1 Disconnect the power cord from the power supply and the POWER LINE INPUT connec...

Страница 89: ...d clamping ring are intended to be used only once Use a new ferrel and a new clamping ring for each installation of the metal tube for the purge gas supply Compression fitting for the purge gas connection Nut Fig 60 Separate the purge gas 1 Using an open ended wrench hold the nut still and loosen the union nut of the compression fitting 2 Pull the metal line out of the compression fitting ...

Страница 90: ... the device remove the air hose from the compressed air quick coupling of the compressed air supply such as the compressed air cylinder and the device To do so press the end face of the compressed air quick coupling pull out the compressed air hose from the compressed air quick coupling and release the end face of the compressed air quick coupling 9 1 4 Disconnect the compressor Cryogenic pump com...

Страница 91: ...pressure Power connection for the cryogenic pump motor Power cord for compressor power supply Connection helium Connection helium Return Line Supply Line Fig 62 Connections on the cryogenic pump compressor Helium Helium Power cord for the cryogenic pump motor Cryogenic pump motor Return Supply Line Line Fig 63 Connections on the device ...

Страница 92: ...ng and remove the circular plug from the COLD HEAD POWER jack Remove the helium lines The Supply and Return helium lines are filled with helium and are under pressure 1 Remove the helium Supply line to the compressor and the device 2 Remove the helium Return line to the compressor and the device 3 Connect the blank flanges to the connections of the 2 helium lines 9 2 Sending in the device WARNING ...

Страница 93: ...INFICON Decommissioning the device 9 Pernicka 700H CHLD Operating instructions jin76aen1 04 1911 93 100 Fig 64 Declaration of Contamination ...

Страница 94: ... the operator or be sent to the manufacturer The device consists of materials that can be recycled This option should be exercised to prevent waste and also to protect the environment During disposal observe the environmental and safety regulations of your country Label for the returns to the recycling circuit Instrument cannot be scrapped with the normal domestic waste ...

Страница 95: ...o the Pernicka 700H CHLD inch compression fitting for connection to gas cylinder with thread according to CGA 580 alternatively 551 701 for connection to gas cylinder with thread according to DIN 477 No 6 alternatively 551 702 for connection to gas cylinder with thread according to DIN 477 No 10 alternatively 551 703 for connection to gas cylinder with thread according to chinese cylinder G518 14 ...

Страница 96: ...11 CE Declaration of Conformity INFICON 96 100 Pernicka 700H CHLD Operating instructions jin76aen1 04 1911 11 CE Declaration of Conformity Fig 65 CE Declaration of Conformity ...

Страница 97: ... methods 42 46 50 51 Electrical data Compressor 26 Device 26 Exhaust filter on the device 23 F Functional description of the measurement process 18 M Maintenance Backing pump Check the oil level 85 CHLD Sensor Check the fan function 79 CHLD Sensor Filter mat 81 General information 78 Internal calibration leak Recalibration 84 Perform calibration 84 Test chamber Change O rings 78 Maintenance plan 8...

Страница 98: ...2 Other associated documents 7 P Password for further details 48 to start 42 Physical data 26 R Regeneration 72 perform before each weekend 72 perform daily 72 Return 92 S Scope of delivery 13 Select cathode in the CHLD Sensor 87 Selection menu 23 Setup 29 Spare parts 95 Storage 14 Switch OFF Cathode in the CHLD Sensor 43 45 Compressor 73 Device 73 SEM amplifier 43 45 Switch ON Cathode in the CHLD...

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