Inficon Pernicka 700H CHLD, Перевод оригинальной инструкции по эксплуатации

Страница: 47 / 100

INFICON Operation | 6
Pernicka-700H-CHLD-Operating-instructions-jin76aen1-04-(1911) 47 / 100
Parameter Description
Measured He LR The measured helium leak rate during a measurement
process in the unit of measurement [mbar l/s] or [atm cc/s].
Measured 2 LR The measured leak rate of a second gas (in multi-gas
mode) during a measurement process in the unit of
measurement [mbar l/s] or [atm cc/s].
6.2.2 Configuring the measurement process
In the "Configuration" window, you perform detailed measurement settings .
► To open the "Configuration” window, press the tab "Configuration".
Control Options
Valve Control
Helium calibration leak
AI configuration
User Form
AutoStartUp
Fig. 22: Window "Configuration"
AI configuration
For assigning the sensor parameters for the corresponding sensors. The curves for
the Pirani sensors, the cryogenic temperature, the test leak temperature and the
rotational speed of the turbo molecular pump are shown.
Control Options
OpMode: Function for internal use by INFICON GmbH.
► Only use the value "Real Unit" for the "OpMode".
Auto-Relight: For automatic switching on the cathode in the CHLD-Sensor when the
target temperature of the cryogenic pump is reached.
► To switch on the cathode automatically in the CHLD-Sensor activate this option.