CyberOptics AMS-150C, Руководство пользователя

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Overview of Main AMS Sub-Functions
As described above, the AMS collects vibration, humidity, and leveling data from your wafer-manufacturing
process in real time. The vibration, humidity, and leveling functions share many of the same
sub-functions , and all
of these sub-functions operate in exactly the same way. The sub-functions, of course, vary slightly in their details
(because the vibration, humidity, and leveling functions use different parameters), but operate along the same
lines and use the same basic, underlying principles. As a result, once you understand a sub-
function in “Vibration,”
you understand it in “Humidity” and “ Leveling ” as well.
The purpose of the following sections therefore is to introduce you to some commonly used MultiView sub-
functions, so you can quickly get up to speed on the way the MultiView software operates. The idea here is to
introduce you to the
underlying concepts behind each sub-function, so do not worry about the details. The sub-
functions that are discussed are as follows.
•
Setting Go/No-Go Tolerances
This allows you get an on-screen warning, when a measured parameter strays from its defined limits.
•
Setting Triggers
This tells the AMS download current real-time data to a log file, whenever a measured parameter strays
beyond its defined Go/No-Go tolerances. The log file can be reviewed during the run, or at a later date.
•
Setting Station Information
This allows you to keep track of each AMS run for record-keeping and quality-control purposes.
•
Saving Your MultiView Settings
This allows you to save your current function and sub-function settings, so they can be used again.
•
Loading Previously Saved Settings from a File
This saves you a lot of time and effort, because you can load settings from previously saved files.
Overview of
Main AMS
Sub-Functions