27
Technical data
Type 8745 Ethernet, 8745 Analogue
6.7.2
Mass Flow Controller with proportional
valve
Tab. 17: Fluid data, MFC with proportional valve
Calibration fluid
Air or operating gas
Mass flow-rate range
(reference to N2 (I
N
/min))
20...1500 I
N
/min
Exact range depends on the product base-block size and on
the gas used. Refer to the datasheet related to the product
Type.
Measuring range
1:50
Larger measuring range
available on request.
Repeatability
±0.1% of the full scale
Operating fluid
See Type label
Measurement accuracy, after
15 minute warm-up time and
with the calibration fluid
± 0.8%
8)
of the measured value
± 0.3%
8)
of the full scale
Settling time
< 500 ms
8) If the
operating fluid is different from the calibration fluid, then the
measurement accuracy can be lower. If the operating gas is nitrogen
or oxygen
, then
the given measurement accuracy is correct. But if the
operating gas is natural gas
, then the measurement accuracy may be
different
because the composition of natural gas varies depending on the
season and origin.
6.7.3
Mass Flow Controller with motor valve
Tab. 18:
Fluid data, MFC with motor valve
Calibration fluid
Air or operating gas
Mass flow-rate range
(reference to N2 (I
N
/min))
20...2500 I
N
/min
Exact range depends on the product base-block size and on
the gas used. Refer to the datasheet related to the product
Type.
Measuring range
1:50
Larger measuring range
available on request.
Repeatability
±0.1% of the full scale
Operating fluid
See Type label
Measurement accuracy, after
15 minute warm-up time and
with the calibration fluid
± 0.8%
9)
of the measured value
± 0.3%
9)
of the full scale
Settling time
< 5 s
9) If the
operating fluid is different from the calibration fluid, then the
measurement accuracy can be lower. If the operating gas is nitrogen
or oxygen
, then
the given measurement accuracy is correct. But if the
operating gas is natural gas
, then the measurement accuracy may be
different
because the composition of natural gas varies depending on the
season and origin.
English
Содержание 8745 MFC Ethernet
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