Brooks 5850 S, Инструкция по установке и эксплуатации

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Installation and Operation Manual
X-DPT-Profibus-Interface-eng
PN 541-C-068-AAG
November, 2008
Mass Flow Controller
byte
# bit
# type range
[dec] default
[dec] options description
Internal system parameter 8 byte n.a. 0
n.a. reserved
Select gas calibration
1 = curve 1
2 = curve 2
3 = curve 3
4 = curve 4
5 = curve 5
6 = curve 6
7 = curve 7
8 = curve 8
9 = curve 9
9 byte 1..10 1
10 = curve 10
Select gas calibration curve
Failsafe state
0 = no effect
1 = Valve no power & setpoint = 0.0
2 = Valve close & setpoint = 0.0
10 byte 0..3 1
3 = Valve open & setpoint = 0.0
Select emergency state if
communication is lost
Primary non fatal alarms
0 bit 1 0 = disabled, 1 = enabled Flow Sensor Error
1 bit 1 0 = disabled, 1 = enabled Temperature Sensor Error
2 bit 1 0 = disabled, 1 = enabled Analogue Output Error
3 bit 1 0 = disabled, 1 = enabled Setpoint overrange
4 bit 1 0 = disabled, 1 = enabled Flow out of range
5 bit 1 0 = disabled, 1 = enabled Output out of range
6 bit 1 0 = disabled, 1 = enabled Valve out of range
11
7 bit 0 0 reserved
Secondary non fatal alarms
0 bit 0 0 = disabled, 1 = enabled Low Flow Alarm
1 bit 0 0 = disabled, 1 = enabled High Flow Alarm
2 bit 0 0 = disabled, 1 = enabled Totalizer overflow
3 bit 0 0 reserved
4 bit 0 0 reserved
5 bit 0 0 reserved
6 bit 0 0 reserved
12
7 bit 0 0 reserved
Ambient non fatal alarms
0 bit 1 0 = disabled, 1 = enabled Temperature Too High
1 bit 1 0 = disabled, 1 = enabled Power Failure
2 bit 1 0 = disabled, 1 = enabled No Flow indication
3 bit 0 0 reserved
4 bit 1 0 = disabled, 1 = enabled Temperature Too Low
5 bit 1 0 = disabled, 1 = enabled Flow Obstruction
6 bit 0 0 reserved
13
7 bit 0 0 reserved
Select softstart option
0 = off Softstart disabled
1 = Non-linear Softstart no-linear
2 = Linear up Softstart linear-up only
3 = Linear down Softstart linear-down only
14 byte 0...4 0
4 = Linear up&down Softstart linear up&down